cas 13862-16-3, Silanamine, N,N-disilyl- | Articles data ｜lookchem

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13862-16-3

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Apparatus and method for the condensed phase production of trisilylamine
The present invention is directed to a condensed phase batch process for synthesis of trisilylamine (TSA). An improved synthesis process that incorporates a solvent to help promote a condensed-phase reaction between ammonia gas (or liquid) and liquified monochlorosilane (MCS) in good yields is described. This process facilitates the removal of the byproduct waste with little to no reactor down time, substantial reduction of down-stream solids contamination and high-purity product from first-pass distillation.
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Page/Page column 9-11

(2016/10/17)

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Chemical Properties

Melting Point: -106°C
Boiling Point: 52°C
Flash Point:-48°C (-54°F)
Density: 0.79g/cm3 at 20℃
Vapor Pressure: 14.532kPa at 0℃
PKA: 3.94±0.70(Predicted)
PSA: 3.24000
LogP: -3.87040

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