Preparation and fine purification of SiF4 and 28SiH4
Silicon tetrafluoride was obtained by the thermal decomposition of pure-grade sodium hexafluorosilicate and purified by low-temperature distillation. Next, SiF4 was 28Si-enriched by centrifugation and converted to silane by calcium h
Formation of impurity Si2OH6 in silane synthesized from silicon tetrafluoride
The possibility of the reduction of hexafluorodisiloxane by calcium hydride in the synthesis of silane from silicon tetrafluoride has been studied. This reaction is shown to be not decisive for oxygen contamination of silane. The most likely reason for the appearance of impurity Si2OH6 in "fluoride" silane is the Ca(OH)2-catalyzed reaction of silane with trace water. The concentration of impurity Si2OH 6 in silane at the stage of synthesis may be efficiently decreased by the preliminary purging of calcium hydride with a hydrogen (grade A) flow.
Bulanov,Sennikov,Sozin, A. Yu.,Lashkov, A. Yu.,Troshin, O. Yu.
p. 510 - 512
(2011/07/29)
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