Chemical Vapour Deposition of Germanium Films by Laser-induced Photolysis of Ethylgermanes
Excimer laser photolysis of ethylgermanes EtnGeH4-n (n = 1-4) at 193 nm yields ethane, ethene and butane along with germanium deposited on the inner surface of the reactor.The distribution of gaseous products is remarkably different
Pola, Josef,Parsons, Jonathan P.,Taylor, Roger
p. 1637 - 1642
(2007/10/02)
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