MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
A polymer comprising recurring units derived from a (meth)acrylate monomer of tertiary ester type having branched alkyl on alicycle is used to form a resist composition. When subjected to exposure, PEB and organic solvent development, the resist composition is improved in dissolution contrast.
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(2014/03/21)
Biocide Compositions Comprising Isoamyl Lactate
Suggested are biocide compositions, comprising (a) Isoamyl lactate; (b) Biocides and optionally (c) Oil components or co-solvents and/or (d) Emulsifiers. The compositions show high solubility for biocides and improved emulsification properties.
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Paragraph 0209
(2013/03/28)
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