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Name	NITROGEN TRIFLUORIDE	EINECS	232-007-1
CAS No.	7783-54-2	Density	1.361 g/cm³
PSA	3.24000	LogP	0.94190
Solubility	Solubility in water 0.021 vol/vol (20 °C, 1 bar)	Melting Point	?206.8 °C (66.35 K)
Formula	F3N	Boiling Point	-129 ºC
Molecular Weight	71.0019	Flash Point	N/A
Transport Information	UN 2451	Appearance	colorless gas
Safety	17-23-38	Risk Codes	8-20
Molecular Structure		Hazard Symbols	O
Synonyms	Nitrogentrifluoride; Perfluoroammonia; Trifluoroamine; Trifluoroammonia	Article Data	107

NITROGEN TRIFLUORIDE Synthetic route

: 400090-26-8
(Cl2Te)2N(1+)*GaCl4(1-)=[(Cl2Te)2N]GaCl4

: 7784-36-3
arsenic pentafluoride

A: 7783-54-2
nitrogen trifluoride

B: [(Cl2Te)2AsF](2+)*[GaCl4](1-)*[AsF6](1-)*AsF5=[(Cl2Te)2AsF][GaCl4][AsF6](AsF5)

Conditions

Conditions	Yield
In liquid sulphur dioxide Ga-compd.:AsF5 molar ratio was 1:2.5, stirring for 12 h at 20 °C; soln. was concd. in vac., crystn. on cooling, drying for 12 h. in vac. at 20 °C, elem. anal.; NF3 was detected by IR;	A n/a B 75%

: 10036-47-2
tetrafluorohydrazine

: 201230-82-2
carbon monoxide

A: 7783-54-2
nitrogen trifluoride

B: 10578-16-2
dinitrogen difluoride

C: 353-50-4
Carbonyl fluoride

D: 2368-32-3
trifluoromethylamide

Conditions

Conditions	Yield
byproducts: N2O, CO2, SiF4; other Radiation; ratio of N2F4 and CO = 1:2, irradiation by high pressure Hg lamp for 2h at room temp.; fractionated distn.;	A n/a B n/a C n/a D 15%
byproducts: N2O, CO2, SiF4; other Radiation; ratio of N2F4 and CO = 1:2, irradiation by high pressure Hg lamp for 2h at room temp.; fractionated distn.;	A n/a B n/a C n/a D 15%

...Expand

: nitrogen

: 75-02-5
1-fluoroethylene

A: 7783-54-2
nitrogen trifluoride

B: 74-90-8
hydrogen cyanide

C: 7664-39-3
hydrogen fluoride

D: 7664-41-7
ammonia

Conditions

Conditions	Yield
byproducts: CH3CN, C2H2F2, CH2CN; in a Pyrex tube at 0.95 Torr; products were detected by mass spectrometry;

...Expand

: 7664-39-3
hydrogen fluoride

: 57-13-6
urea

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis; in anhydrous HF at -10°C;

: 10036-47-2
tetrafluorohydrazine

: silver nitrate

A: 7783-54-2
nitrogen trifluoride

B: silver fluoride

C: 10544-72-6
dinitrogen tetraoxide

D: 7789-25-5
nitrosyl fluoride

Conditions

Conditions	Yield
In neat (no solvent) 60°C, 18 h;;

...Expand

: ammonium bifluoride

A: 7783-54-2
nitrogen trifluoride

B: 7727-37-9
nitrogen

C: 1333-74-0
hydrogen

D: 10028-15-6
ozone

E: 10024-97-2
dinitrogen monoxide

Conditions

Conditions	Yield
In melt byproducts: O2; Electrolysis; reaction by electrolysis of molten NH4F*HF with a Cu cathode and a graphite anode at 125 °C;;
In melt byproducts: O2; Electrolysis; reaction by electrolysis of molten NH4F*HF with a Cu cathode and a graphite anode at 125 °C;;

...Expand

: 7664-41-7
ammonia

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
byproducts: N2, HF; violent reaction; further unidenfed products formed;
In neat (no solvent)
In neat (no solvent)
byproducts: N2, HF; violent reaction; further unidenfed products formed;

: 1495-50-7
cyanogen fluoride

: fluorine

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

Conditions

Conditions	Yield
In neat (no solvent) quenching reaction at 1500-4000K;;

: 7664-39-3
hydrogen fluoride

: 113-00-8
guanidine nitrate

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 7727-37-9
nitrogen

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis; at 15°C; ratio of NF3:CF4 = 2.5; 40 % soln. of guanidine in anhydrous liquid HF;
In hydrogen fluoride HF (liquid); Electrolysis; at 15°C; ratio of NF3:CF4 = 2.5; 40 % soln. of guanidine in anhydrous liquid HF;

: 10578-16-2
dinitrogen difluoride

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In neat (no solvent)
In neat (no solvent)	>99
In neat (no solvent)
In neat (no solvent)	>99

NITROGEN TRIFLUORIDE Chemical Properties

NITROGEN TRIFLUORIDE（7783-54-2） is the chemical compound with the formula F₃N .Its molar weight is 71.
NITROGEN TRIFLUORIDE（7783-54-2） chemical structural formula is

Synonyms：N,N,N-Trifluoroamine;NF₃;Nitrogen fluoride (NF₃);nitrogenfluoride(nf₃);Perfluoroammonia;Stickstoff(III)-fluorid;Stickstofftrifluorid;Trifluoroamine

mp： -207 ℃
bp： -129 ℃
Water Solubility： insoluble
CAS ：7783-54-2

NITROGEN TRIFLUORIDE Uses

NITROGEN TRIFLUORIDE（7783-54-2）is used in the plasma etching of silicon wafers. Today it is mainly employed in the cleaning of the PECVD chambers in the high volume production of liquid crystal displays and silicon-based thin film solar cells. In these applications NF₃ is initially broken down in situ, by a plasma. The resulting fluorine atoms are the active cleaning agents that attack the polysilicon,silicon nitride and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD. Erroneously NF₃ has been considered as an environmentally preferable substitute for perfluorocarbons such as hexafluoroethane,sulfur hexafluoride etc. The process utilization of the chemicals applied in plasma processes is typically below 20 %. Therefore some of the PFCs and also of the NF₃ always escape into the atmosphere. Modern gas abatement systems can decrease such emissions.

Recently elemental fluorine has been introduced as an environmentally friendly replacement for nitrogen trifluoride in state-of-the-art high volume manufacturing of flat panel displays and solar cell manufacturing.

NITROGEN TRIFLUORIDE（7783-54-2） is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. It is preferred to fluorine gas due to its convenient handling properties, reflecting its considerable stability.

It is compatible with steel and Monel, as well as several plastics.

NITROGEN TRIFLUORIDE Production

NF₃ is a rare example of a binary fluoride that cannot be prepared directly from the elements (i.e., N₂ does not react with F₂). Almost all other elements in the periodic table react directly, often violently, with fluorine.
Today, it is prepared both by direct reaction of ammonia and fluorine and by a variation of Ruff's method.It is supplied in pressurized cylinders.

NITROGEN TRIFLUORIDE Toxicity Data With Reference

1.	ihl-rat LC50:6700 ppm/1H	TXAPA9 Toxicology and Applied Pharmacology. 26 (1973),1.
2.	ihl-mus LC50:2000 ppm/4H	34ZIAG Toxicology of Drugs and Chemicals ,Deichmann, W.B.,New York, NY.: Academic Press, Inc.,1969,427.
3.	ihl-dog LC50:9600 ppm/1H	AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) TR-69-84 ,1969.
4.	ihl-mky LC50:7500 ppm/1H	AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) TR-69-84 ,1969.

NITROGEN TRIFLUORIDE Consensus Reports

Reported in EPA TSCA Inventory.

NITROGEN TRIFLUORIDE Safety Profile

A poison. Mildly toxic by inhalation. Prolonged absorption may cause mottling of teeth, skeletal changes. Severe explosion hazard by chemical reaction with reducing agents, particularly when under pressure. A very dangerous fire hazard; a very powerful oxidizer; otherwise inert at normal temperatures and pressures. Reacts violently when ignited with H2. When pure (dry) it does not attack glass or mercury at normal temperatures. Can react violently with NH3, CO, diborane, H2, H2S, CH4, tetrafluorohydrazine. Can react vigorously with reducing materials. Particularly hazardous under pressure. Incompatible with charcoal, hydrogen-containing compounds, tetrafluorohydrazine. When heated to decomposition it emits highly toxic fumes of F−. See also FLUORIDES.

NITROGEN TRIFLUORIDE Standards and Recommendations

OSHA PEL: TWA 10 ppm
ACGIH TLV: TWA 10 ppm; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift.
NIOSH REL: (Inorganic Fluorides) TWA 2.5 mg(F)/m³
DOT Classification: 2.2; Label: Nonflammable Gas, Oxidizer

NITROGEN TRIFLUORIDE Specification

NF₃ is a greenhouse gas, with a GWP 17,200 times greater than that of CO₂ when compared over a 100 year period. Its GWP would place it second only to SF6 in the group of Kyoto-recognised greenhouse gases, although NF₃ is not currently included in that grouping. It has an estimated atmospheric lifetime of 740 years, although other work suggests a slightly shorter lifetime of 550 years (and a corresponding GWP of 16,800).

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