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| CAS No.: | 4109-96-0 |
|---|---|
| Name: | Dichlorosilane |
| Article Data: | 52 |
| Molecular Structure: | |
|
|
|
| Formula: | Cl2H2Si |
| Molecular Weight: | 101.007 |
| Synonyms: | Siliconchloridehydride; |
| EINECS: | 223-888-3 |
| Density: | 1,22 g/cm3 |
| Melting Point: | -122 °C(lit.) |
| Boiling Point: | 8.3 °C at 760 mmHg |
| Flash Point: | -37°C |
| Solubility: | decomposes |
| Appearance: | colourless gas |
| Hazard Symbols: |
 F+, T
|
| Risk Codes: | 12-14-23-34 |
| Safety: | 26-36/37/39-45 |
| Transport Information: | UN 2189 |
| PSA: | 0.00000 |
| LogP: | 0.46280 |
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| Conditions | Yield |
|---|---|
| In neat (no solvent) reaction at 100 °C for a longer period of time;; | 79% |
| In neat (no solvent) reaction at 100 °C for a longer period of time;; | 79% |
| Conditions | Yield |
|---|---|
| With hydrogenchloride In diethyl ether at 60℃; for 19h; Temperature; | A 5% B 17% C 76% |
| With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; Reagent/catalyst; Schlenk technique; Inert atmosphere; | A 16 %Spectr. B 36 %Spectr. C 40 %Spectr. |
| Conditions | Yield |
|---|---|
| In diethyl ether at 60℃; for 20h; | A 73% B 27% |
| In diethyl ether at 80℃; for 42h; | A 34% B 66% |
| Conditions | Yield |
|---|---|
| With hydrogenchloride In diethyl ether at 80℃; for 15h; Solvent; Temperature; | A 64% B 36% |
| With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; for 15h; Reagent/catalyst; Schlenk technique; Inert atmosphere; | A 64 %Spectr. B 36 %Spectr. |
| Conditions | Yield |
|---|---|
| With hydrogenchloride In diethyl ether at 60℃; for 20h; | A 42% B 13% |
| With hydrogenchloride In diethyl ether at 80℃; for 42h; | A 20% B 33% |
| With hydrogenchloride; diethyl ether In benzene-d6 at 60℃; for 20h; Reagent/catalyst; Schlenk technique; Inert atmosphere; | A 42 %Spectr. B 13 %Spectr. |
| With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; Reagent/catalyst; Schlenk technique; Inert atmosphere; | A 20 %Spectr. B 33 %Spectr. |
| Conditions | Yield |
|---|---|
| With aluminium In neat (no solvent) passing a mixture of SiHCl3 and H2 (1:2) over Al at 350 °C;; separation by fractionated distillation;; | A 1-2 B 15% |
| With Al In neat (no solvent) passing a mixture of SiHCl3 and H2 (1:2) over Al at 350 °C;; separation by fractionated distillation;; | A 1-2 B 15% |
| Conditions | Yield |
|---|---|
| With hydrogenchloride; trichlorosilane; aluminium chloride | |
| With trichlorosilane; aluminium chloride | |
| With trichlorosilane; aluminium chloride |
- 82146-27-8
dibromochlorosilane
- 1631-73-8
trimethylstannane
A
- 13768-94-0
dibromosilane
B
- 13966-57-9
chlorosilane
C
- 4109-96-0
Dichlorosilane
| Conditions | Yield |
|---|---|
| In neat (no solvent) condensing of equimolar amts. of tinhydride and SiClHBr2 (trace of SiCl2HBr present) into cold finger, reaction at room temp. (30 min); further products; not isolated; IR spectroscopy; | A 0% B n/a C 0% |
- 10025-78-2
trichlorosilane
- 1631-73-8
trimethylstannane
A
- 1066-45-1
trimethyltin(IV)chloride
B
- 7440-21-3
monosilane
C
- 4109-96-0
Dichlorosilane
| Conditions | Yield |
|---|---|
| In neat (no solvent) inert atmosphere (N2, Ar or high vac.), room temperature, equimolar amts. of halosilane/tinhydride, reactn. time 12 h; not isolated; IR spectroscopy (identified 41% SiCl2H2 and 15% SiH4 in product mixt.); |
- Total:28 Page 1 of 1 1
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Chemistry
Product Name: Dichlorosilane (CAS NO.4109-96-0)
Molecular Formula: Cl2H2Si
Molecular Weight: 101.01g/mol
Mol File: 4109-96-0.mol
Einecs: 223-888-3
Melting Point: -122 °C(lit.)
Boiling point: 8.3 °C at 760 mmHg
Flash Point: -37°C
Density: 1,22 g/cm3
Water Solubility: Decomposes
Stability: Stable. Extremely flammable; note very wide explosion limits. Reacts violently with water, alcohols, strong oxidizing agents, bases.
Enthalpy of Vaporization: 25 kJ/mol
Vapour Pressure: 1360 mmHg at 25°C
Product Categories: Chemical Synthesis; Compressed and Liquefied GasesMicro/Nanoelectronics; Electronic Chemicals; Gases; Synthetic Reagents
Uses
Dichlorosilane (CAS NO.4109-96-0) is used in semiconductor manufacturing, especially the epitaxy process as the silicon source.It is also used in the electronics industry in the poly-silicon epitaxial growth, as well as chemical vapor deposition silicon dioxide and silicon nitride.
Toxicity Data With Reference
TOXIC; may be fatal if inhaled or absorbed through skin. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.
| Organism | Test Type | Route | Reported Dose (Normalized Dose) | Effect | Source |
|---|---|---|---|---|---|
| mouse | LC50 | inhalation | 144ppm/4H (144ppm) | Archives of Toxicology. Vol. 70, Pg. 218, 1996. | |
| rat | LC50 | inhalation | 215ppm (215ppm) | SENSE ORGANS AND SPECIAL SENSES: LACRIMATION: EYE LUNGS, THORAX, OR RESPIRATION: ACUTE PULMONARY EDEMA LUNGS, THORAX, OR RESPIRATION: DYSPNEA | Journal of Toxicological Sciences. Vol. 18, Pg. 394, 1993. |
Consensus Reports
Reported in EPA TSCA Inventory.
Safety Profile
Flammable; may be ignited by heat, sparks or flames. May form explosive mixtures with air. Vapors from liquefied gas are initially heavier than air and spread along ground. Vapors may travel to source of ignition and flash back. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and flammable gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. Runoff may create fire or explosion hazard.
Safety Information of Dichlorosilane (CAS NO.4109-96-0):
Hazard Codes: F+.gif){kind=small}
,T.gif){kind=small}
Risk Statements: 12-14-23-34
12: Extremely Flammable
14: Reacts violently with water
23: Toxic by inhalation
34: Causes burns
Safety Statements: 26-36/37/39-45
26: In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36: Wear suitable protective clothing
37: Wear suitable gloves
39: Wear eye/face protection
45: In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
Specification
Dichlorosilane ,its CAS NO. is 4109-96-0,the synonyms is Dichloro-silan ; Siliconchloridehydride .