Reference

Immersion solution for immersion photolithography with KrF excimer exposure laser beam

All Rights Reserved. Immersion solution for immersion photolithography with KrF excimer exposure laser beam. Miyamatsu, Takashi; Wang, Yong (Jsr Ltd., Japan). Jpn. Kokai Tokkyo Koho JP 2006352032 A 28 Dec 2006, 22pp. (Japanese). (Japan). CODEN: JKXXAF. APPLICATION: JP 2005-179583 20 Jun 2005. DOCUMENT TYPE: Patent CA Section: 74 (Radiation Chemistry, Photochemistry, and Photographic and Other Reprographic Processes) The title soln.There are some commonly used reagents with their cas registry numbers 696-29-7 and 34160-02-6 in this article. has 390% transmittance of 248 nm light per 1 mm optical path and is a purified monocyclic hydrocarbon. The soln. generates little swelling nor dissolving of resins and eludes no hydrophobic additive from a photoresists. .

Gas chromatographic investigation of the adsorption of polymethylcyclohexanes on graphitized thermal carbon black

Gas chromatographic investigation of the adsorption of polymethylcyclohexanes on graphitized thermal carbon black. Engewald, W.; Kalashnikova, E. V.; Kiselev, A. V.; Petrova, R. 696-29-7 which is the cas registry number is also used here. S.; Shcherbakova, K. D.; Shilov, A. L. (Chem. Sect., Leipzig Univ., Leipzig, Ger.). J. Chromatogr., 152(2), 453-66 (English) 1978. 696-29-7 which is the cas registry number of some chemical is mentioned. CODEN: JOCRAM. ISSN: 0021-9673. DOCUMENT TYPE: Journal CA Section: 66 (Surface Chemistry and Colloids) Section cross-reference(s): 22 The thermodn. functions of adsorption (Henry consts., retention indices, changes in internal energy and entropy at zero sample size) of geometric and structural isomers of polymethylcyclohexanes on graphitized thermal carbon black were detd. and their relation to the structures of the mols. was established. A mol. statistical calcn. of these functions for the adsorption of cyclohexane, methylcyclohexane, and some di-, tri- and tetramethylcyclohexanes was carried out by the atom-atom approxn. for the potential function of intermol. interaction with graphitized thermal carbon black. Examples of the sepn. of some mixts. of these hydrocarbons are given. Most of the 31 cyclohexane derivs. studied had Me groups only, but some had other alkyl groups. ..