129365-24-8 Usage
Description
1-CBZ-PIPERAZINE-2-CARBOXYLIC ACID is a chemical compound that serves as a modifier in various industrial applications, particularly in the process of polishing tungsten through chemical mechanical planarization (CMP).
Uses
Used in Semiconductor Industry:
1-CBZ-PIPERAZINE-2-CARBOXYLIC ACID is used as a polishing modifier for enhancing the efficiency and effectiveness of tungsten polishing in the chemical mechanical planarization process. This is crucial for achieving a smooth and uniform surface on semiconductor wafers, which is essential for the performance and reliability of integrated circuits.
Used in Tungsten Polishing Process:
1-CBZ-PIPERAZINE-2-CARBOXYLIC ACID is used as a chemical modifier to improve the selectivity and removal rate of tungsten during the CMP process. This helps in achieving a high-quality polished surface with minimal defects, which is vital for the successful fabrication of semiconductor devices.
Check Digit Verification of cas no
The CAS Registry Mumber 129365-24-8 includes 9 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 6 digits, 1,2,9,3,6 and 5 respectively; the second part has 2 digits, 2 and 4 respectively.
Calculate Digit Verification of CAS Registry Number 129365-24:
(8*1)+(7*2)+(6*9)+(5*3)+(4*6)+(3*5)+(2*2)+(1*4)=138
138 % 10 = 8
So 129365-24-8 is a valid CAS Registry Number.
InChI:InChI=1/C13H16N2O4/c16-12(17)11-8-14-6-7-15(11)13(18)19-9-10-4-2-1-3-5-10/h1-5,11,14H,6-9H2,(H,16,17)
