31250-06-3Relevant articles and documents
Photocurable resin composition, dry film thereof, pattern forming method, and electrical/electronic part protective film
-
, (2012/05/04)
A photocurable composition includes: (A) an epoxy group-containing polymer compound having repeating units represented by the following formula (1), where R1 to R4 are each a hydrocarbon group, m is an integer of 1 to 100, a, b, c and d are each 0 or a positive number, such that 0 (c+d)/(a+b+c+d) ≤ 1.0, and X and Y are each the formula (2) or (3), provided that at least one group of the formula (3) is present, (B) a photoacid generator represented by the formula (8) and (C) a solvent.
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
-
, (2010/04/23)
A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising recurring units containing a non-leaving hydroxyl group represented by formula (1) wherein R1 is H, methyl or trifluoromethyl, X is a single bond or methylene, m is 1 or 2, and the hydroxyl group attaches to a secondary carbon atom. The composition is improved in resolution when processed by lithography.
Coordination to RMg+ and RZn+ cations
Tang, Hui
, p. 4810 - 4819 (2008/10/08)
Addition of a second coordinating agent (coord*) to a solution of RM(coord)+A- (R = ethyl or neopentyl, M = Zn or Mg, A- = 1,2,3,4-tetraphenylcyclopentadienyl) can provide equilibrium mixtures of these compounds, coord, and RM(coord*)+A-. This exchange with RMg(coord)+ requires the addition of a small amount of R2Mg, but added R2Zn is not necessary for exchanges with RZn(coord)+. The equilibrium constants provide information about the relative abilities of different coordinating agents to coordinate to RM+ and reveal significant differences between coordination to RMg+ and RZn+. Reactions of RM(coord)+ with R′2M (R = ethyl or neopentyl for RMg(coord)+ and ethyl, isopropyl, tert-butyl, neopentyl, or p-methylphenyl for RZn(coord)+) provide equilibrium mixtures of these components, R′M(coord)+, and R2M. The equilibrium constants provide information about the effect of R on stability. An X-ray structure of p-methylphenylzinc(2,5,8,11-tetramethyl-2,5,8,11-tetraazadodecane)+ shows that just three of the N atoms are coordinated to Zn. The effects of coord, R, and metal on RM(coord)+ stability are discussed, and the abilities of coordinating agents to coordinate to RM+, to slow allylic isomerization of (CH2 double bond CMeCH2)2Zn, and to convert R2Zn to RZn(coord)+ are compared.