67313-80-8

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Basic information

Product Name: TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(&
Synonyms: tris(diethylamido)(ethylimido)tantalum(v);tris(diethylamino)(ethylimino)tantalum(v);Tris(diethylaMino)(ethyliMino)tantaluM, 99,99% [(C2H5)2N]3Ta=NC2H5 F.W.440,41
CAS NO:67313-80-8
Molecular Formula: C14H35N4Ta
Molecular Weight: 440.409
EINECS: N/A
Product Categories: N/A
Mol File: 67313-80-8.mol
Article Data: 0

Chemical Properties

Melting Point: N/A
Boiling Point: N/A
Flash Point: 36 °F
Appearance: /
Density: 1.31 g/mL at 25 °C(lit.)
Refractive Index: n20/D 1.51(lit.)
Storage Temp.: N/A
Solubility: N/A
CAS DataBase Reference: TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(&(CAS DataBase Reference)
NIST Chemistry Reference: TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(&(67313-80-8)
EPA Substance Registry System: TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(&(67313-80-8)

Safety Data

Hazard Codes: F
Statements: 11-34
Safety Statements: 16-26-27-36/37/39
RIDADR: UN 2924 3/PG 2
WGK Germany: 3
RTECS:
HazardClass: N/A
PackingGroup: N/A
Hazardous Substances Data: 67313-80-8(Hazardous Substances Data)

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67313-80-8 Usage

General Description

TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is a chemical compound that is commonly used as a precursor for metal organic chemical vapor deposition (MOCVD) of tantalum nitride thin films. It is a coordination compound containing tantalum, nitrogen, carbon, and hydrogen atoms, and is typically employed in the production of electronic components and thin film coatings for various applications. The compound is known for its high thermal stability and is an important reagent in the field of materials science for the synthesis of advanced materials with unique electrical and mechanical properties. Additionally, it is used in the semiconductor industry for the fabrication of integrated circuits and other electronic devices.

Check Digit Verification of cas no

The CAS Registry Mumber 67313-80-8 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 6,7,3,1 and 3 respectively; the second part has 2 digits, 8 and 0 respectively.
Calculate Digit Verification of CAS Registry Number 67313-80:
(7*6)+(6*7)+(5*3)+(4*1)+(3*3)+(2*8)+(1*0)=128
128 % 10 = 8
So 67313-80-8 is a valid CAS Registry Number.

67313-80-8SDS

SAFETY DATA SHEETS

According to Globally Harmonized System of Classification and Labelling of Chemicals (GHS) - Sixth revised edition

Version: 1.0

Creation Date: Aug 20, 2017

Revision Date: Aug 20, 2017

1.Identification

1.1 GHS Product identifier

Product name	diethylazanide,ethyliminotantalum

1.2 Other means of identification

Product number	-
Other names	-

1.3 Recommended use of the chemical and restrictions on use

Identified uses	For industry use only.
Uses advised against	no data available

1.4 Supplier's details

1.5 Emergency phone number

Emergency phone number	-
Service hours	Monday to Friday, 9am-5pm (Standard time zone: UTC/GMT +8 hours).

More Details:67313-80-8 SDS

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