- COMPOUND, POLYMER, PATTERN FORMING MATERIAL, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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A pattern forming material is configured to use for forming an organic film on a film to be processed, patterning the organic film, and then forming a composite film by infiltrating a metallic compound into the patterned organic film. The pattern forming material contains a polymer including a monomer unit represented by a general formula (3) described below, where R21 is H or CH3, each R22 is a hydrocarbon group of C2-14 where α carbon is primary carbon, secondary carbon or tertiary carbon, Q is a single bond or a hydrocarbon group of C1-20 carbon atoms which may include an oxygen atom, a nitrogen atom, or a sulfur atom between carbon-carbon atoms of or at a bond terminal, and a halogen atom may be substituted for the hydrogen atom.
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Paragraph 0016; 0159-0160
(2021/03/13)
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- Vinyl dialkyl ester isophthalate monomer and liquid crystal polymer and preparation method thereof
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The invention discloses a vinyl dialkyl ester isophthalate monomer and a liquid crystal polymer and a preparation method thereof. The monomer can be used for preparing polymers with the molecular weight between one hundred thousand to two hundred thousand through ordinary free radical polymerization. The polymers can form multilayer hexagonal prism liquid crystal phase (phi h), Compared with carapace type liquid crystal macromolecules, the polymer provided by the invention can be easily synthesized; the initial raw material of methylisophthalic acid is a general reagent. Compared with a dendronized polymer, the polymer provided by the invention contains fewer two alkyl chains; the side chain self assembly capability is high; the multilayer structure phi phase material can be formed. Through the long alkyl chain crystallization-fusion transformation of the polymers, the material can be used as a phase change energy accumulation phi phase material.
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