Design and synthesis of a photoaromatization-based two-stage photobase generator for pitch division lithography
The synthesis of a two-stage photobase generator (PBG) based on photoinduced aromatization is described. This material was designed for use in resolution-enhanced photolithography. Computer modeling predicts that a delay in the onset of base generation ca
Hagiwara, Yuji,Mesch, Ryan A.,Kawakami, Takanori,Okazaki, Masahiro,Jockusch, Steffen,Li, Yongjun,Turro, Nicholas J.,Grant Willson
p. 1730 - 1734
(2013/03/29)
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