- ACETAL COMPOUNDS AND THEIR PREPARATION, POLYMERS, RESIST COMPOSITIONS AND PATTERNING PROCESS
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An acetal compound of formula (1) is provided wherein R1 is H, methyl or trifluoromethyl, R2 is a monovalent C1-C10 hydrocarbon group, R3 and R4 are H or a monovalent C1-C10 hydrocarbon group, R2 and R3 may together form an aliphatic hydrocarbon ring, and X1 is a single bond or a divalent C1-C4 hydrocarbon group. A polymer comprising recurring units derived from the acetal compound is used as a base resin to formulate a resist composition which exhibits a high resolution when processed by micropatterning technology, especially ArF lithography.
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- Ether monomers and polymers having multi-ring structures, and photosensitive polymers and resist compositions obtained from the same
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Provided are a variety of monomers suitable of producing photosensitive polymers, that are in turn, useful in photoresist compositions, through radical (cationic) polymerization including at least one multi-ring alkenyl ethers and one α-fluorinated acryla
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- Ether monomers and polymers having multi-ring structures, and photosensitive polymers and resist compositions obtained from the same
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Provided are a variety of monomers suitable of producing photosensitive polymers, that are in turn, useful in photoresist compositions, through radical (cationic) polymerization including at least one multi-ring alkenyl ethers and one α-fluorinated acryla
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- Studies on the preparation of 2-(trifluoromethyl)acrylic acid and its esters from 3,3,3-trifluoropropene via hydrocarbonylation reactions
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The synthesis of methyl α-(trifluoromethyl)acrylate (MTFMA) has been carried out in three steps starting from commercially available 3,3,3,-trifluoropropene; this route involving the cobalt-catalyzed carbonylation of 2-bromo-3,3,3-trifluoropropene (2-Br-TFP) under very mild reaction conditions, gave only about 30% yield of the desired methyl ester. 2-(Trifluoromethyl)propanal, available in 90% yield by rhodium catalyzed hydroformylation of 3,3,3-trifluoropropene, proved to be an interesting starting product for the preparation of MTFMA: while the synthetic route involving the α-halogenation of 2-(trifluoromethyl)propanoic acid (TFMPA) failed to give any results, the reaction scheme based on the α-selenenylation of the above aldehyde followed by H2O2-oxidation afforded 68% yield of 2-(trifluoromethyl)acrylic acid (TFMAA).
- Botteghi, Carlo,Lando, Claudia,Matteoli, Ugo,Paganelli, Stefano,Menchi, Gloria
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- Preparation of (R)- and (S)-3-Hydroxy-2-(trifluoromethyl)propionic Acid by Resolution with (R,R)- and (S,S)-2-Amino-1-phenylpropane-1,3-diol
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Racemic 2-trifluoromethyl-3-hydroxypropionic acid (rac-1) is prepared on a 50 g scale from 3,3,3-trifluoropropene in four steps, the overall yield being 40percent.A procedure for the resolution of rac-1 with 2-amino-1-phenylpropane-1,3-diol is described (25 g scale).The acids (R)-1 and (S)-1 are isolated, their enantiomer purities determined by GC analysis of the corresponding methyl esters on a chiral column and their chirality senses assigned from an X-ray crystal structure of the salt formed with phenylethylamine.The non-fluorinated analog of 1 is frequently employed as a chiral synthetic building block ("Roche acid").
- Goetzoe, Stephan P.,Seebach, Dieter
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- Method for preparation of α, β-unsaturated carboxylic acid containing fluorine
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A method for preparing α, β-unsaturated carboxylic acids of the formula where R1 to R3 can be hydrogen, fluorine, alkyl, or alkyl containing fluorine, but at least one of R1 to R3 is fluorine or alkyl containing fluorine. The method involves reacting an alkenyl halide containing fluorine having the general formula where R1 to R3 are the same as above, and X is chlorine, bromine, or iodine with carbon dioxide in an aprotic polar organic solvent and in the presence of activated zinc. The activated zinc is activated by pretreatment with a mineral acid or acetic acid. At least one cation is present during the reaction which is an alkali metal ion, alkaline earth metal ion or ammonium ion. The cation is present in an amount of 0.01 to 50 gram atoms per one mol of alkenyl halide containig fluorine. The resulting product is hydrolyzed.
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- Process for producing fluorine-containing aliphatic carboxylic acids
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Process for producing fluorine-containing aliphatic carboxylic acids having the general formula of Y--Rf --Y' as defined herein by reaction of fluorine-containing aliphatic halogen compounds having the general formula of X--R4 --X' as defined herein with carbon dioxide under the presence of zinc in an organic solvent and hydrolysis of the reaction product, wherein the improvement comprises controlling the concentration of carbon dioxide in the organic solvent at a level of 0.3 to 5 mol/l.
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- Production of 5-perfluoroalkyldihydrouracil derivatives
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A process for preparing a 5-perfluoroalkyl-dihydrouracil derivative of the general formula STR1 wherein Rf represents a perfluoroalkyl group, each of R1 and R2 represents a hydrogen atom, or an alkyl, cycloalkyl, aryl, aralkyl or heterocyclic group, and Y is an oxygen or sulfur atom, which comprises (a) reacting a compound of the general formula STR2 wherein X represents a halogen atom or hydroxyl group, with a urea derivative of the general formula STR3 provided that when X is a hydroxyl group and at least one of R1 and R2 is a hydrogen atom, said reaction is carried out in the presence of a condensing agent, or (b) cyclizing a compound of the general formula STR4 and a novel intermediate compound of the above formula (IV).
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