- NOVEL CYCLODISILAZANE DERIVATIVE, METHOD FOR PREPARING THE SAME AND SILICON-CONTAINING THIN FILM USING THE SAME
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Provided are a novel cyclodisilazane derivative, a method for preparing the same, and a silicon-containing thin film using the same, wherein the cyclodisilazane derivative having thermal stability, high volatility, and high reactivity and being present in a liquid state at room temperature and under a pressure where handling is easy, may form a high purity silicon-containing thin film having excellent physical and electrical properties by various deposition methods.
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Paragraph 130
(2015/07/23)
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- Novel cyclodisilazane derivatives, method for manufacturing thereof and silicon-containing thin film using the same
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The present invention relates to a novel cyclodisilazane derivative, a method for producing the same, and a silicon-containing thin film manufactured by using the same. The novel cyclodisilazane derivative is a compound which is thermally stable and has high reactivity. Therefore, the novel cyclodisilazane derivative as a liquid compound can be used to form the silicon-containing thin film with excellent physical, electrical properties, and high purity in various deposition methods at room temperature and under handling pressure.COPYRIGHT KIPO 2015
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Paragraph 0115-0116
(2016/12/16)
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- CO2 as an oxygen source for polysiloxanes - Preparation, crystal structure and thermal decomposition of two novel silylcarbamates
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Diaminosilanes (CH3)2Si(NHR)2 1a, b are obtained from dichlorodimethylsilane and primary amines (R = n-hexyl, iso-propyl) in good yields. Bis-insertion of CO2 into the Si-N bonds of the aminosilanes quantitatively gives the silylcarbamates (CH 3)2Si(OCONHR)2, 2a, b. Oligo-and polydimethylsiloxanes 3a, b as well as N, N'-substituted ureas CO(NHR) 2 4a, b are formed upon heating the silylcarbamates 2a, b to ~ 150 °C. The results of comprehensive NMR analyses of the aminosilanes, the two novel bis-silylcarbamates, the siloxanes and the ureas, and of single-crystal structure analyses of 2a and 4b are presented. In the crystal the n-hexyl silylcarbamate 2a shows a similar molecular packing arrangement as the iso-propyl urea derivative 4b.
- Wiltzsch, Conny,Kraushaar, Konstantin,Schwarzer, Anke,Kroke, Edwin
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experimental part
p. 917 - 922
(2011/10/11)
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- Synthesis and characterisation of novel zirconium(IV) derivatives containing the bis-amido ligand SiMe2(NRR′)2
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The silicon compounds SiMe2(NRR′)2 [NRR′ = NMe2 (1), NEt2 (2), NC4H8 (3), NHEt (4), NHiPr (5), NHtBu (6), NMeBu (7)] have been synthesised via aminolysis of the dichloro species SiMe2Cl 2 and their ligating ability has been investigated towards zirconium(IV). The dimer zirconium compound {Zr[(NiPr) 2SiMe2]2}2 (8) has been synthesised by reacting ZrCl4 with the lithium salt Li2[(N iPr)2SiMe2] and its molecular structure has been determined in the solid state by X-ray diffraction analysis. The reaction of ZrCl4 with SiMe2(NRR′)2 yields the Lewis adducts ZrCl4[(NRR′)2SiMe2] [NRR′ = NMe2 (10), NC4H8 (11), NHEt (12), NHiPr (13), NHtBu (14), NMeBu (15)]. On the other hand, the mixed amido derivative Zr(NMe2)3(NHMe)[(N′Bu) SiMe2(NH′Bu)] (9) has been obtained from the reaction of Zr(NMe2)4 with SiMe2(NHtBu) 2. The solution molecular structure and dynamics of the zirconium derivatives have been elucidated by 1D and 2D multinuclear NMR spectroscopy.
- Passarelli, Vincenzo,Benetollo, Franco,Zanella, Pierino,Carta, Giovanni,Rossetto, Gilberto
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p. 1411 - 1418
(2007/10/03)
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- New diazasilaphosphetidines and their precursors
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A series of aminosilanes (R′HN)2SiR2 have been prepared. In case of bulky substituents R1 the aminolysis of Ph2SiCl2 stops at the (R′HN)ClSiPh2 stage. Replacement of the Cl atom is achieved with LiNHR′ which allows the synthesis of mixed bisaminosilanes (R′HN)(R″HN)SiPh2. The X-ray structures of three of these compounds have been determined. There are no intermolecular N-H...N hydrogen bonds in these compounds in the solid state. Several 1,3,2,4-diazaphosphetidines have been synthesized using bis(N-lithioamino)silanes and bis(N-lithioamino)phosphanes . Amongst these the heterocycle 18 possesses an almost planar four membered N2SiP ring system.
- Eichhorn, Bettina,Noeth, Heinrich
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p. 352 - 360
(2007/10/03)
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