1041374-16-6

Basic information

• Product Name: 5-vinylbenzene-1,3-dicarboxylic acid
• CAS NO: 1041374-16-6
• Molecular Weight: 192.171
• Mol File: 1041374-16-6.mol
• Article Data: 2

Chemical Properties

• CAS DataBase Reference: 5-vinylbenzene-1,3-dicarboxylic acid(CAS DataBase Reference)
• NIST Chemistry Reference: 5-vinylbenzene-1,3-dicarboxylic acid(1041374-16-6)
• EPA Substance Registry System: 5-vinylbenzene-1,3-dicarboxylic acid(1041374-16-6)

Safety Data

• Hazardous Substances Data: 1041374-16-6(Hazardous Substances Data)

Upstream product

• 50-00-0 formaldehyd 
• 142746-78-9 (3,5-Bis-methoxycarbonyl-benzyl)-triphenyl-phosphonium; bromide 
• 42268-88-2 1,3-dimethyl 5-(bromomethyl)benzene-1,3-dicarboxylate 
• 17649-58-0 5-Methylisophthalsaeure-dimethylester 
• 13438-29-4 5-methylisophthaloyl dichloride 
• 499-49-0 5-methylisophthalic aicd 

Relevant articles and documents

COMPOUND, POLYMER, PATTERN FORMING MATERIAL, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

A pattern forming material is configured to use for forming an organic film on a film to be processed, patterning the organic film, and then forming a composite film by infiltrating a metallic compound into the patterned organic film. The pattern forming material contains a polymer including a monomer unit represented by a general formula (3) described below, where R21 is H or CH3, each R22 is a hydrocarbon group of C2-14 where α carbon is primary carbon, secondary carbon or tertiary carbon, Q is a single bond or a hydrocarbon group of C1-20 carbon atoms which may include an oxygen atom, a nitrogen atom, or a sulfur atom between carbon-carbon atoms of or at a bond terminal, and a halogen atom may be substituted for the hydrogen atom.