1082204-90-7Relevant articles and documents
RADIATION-SENSITIVE COMPOUND, RADIATION-SENSITIVE RESIN COMPOSITION, CURED FILM, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
-
Paragraph 0127-0128, (2016/12/16)
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excellent in radiation sensitivity and solvent resistance, and a radiation-sensitive compound suitable for being used in a cured film excellent in insulation property and transparency. SOLUTION: There is provided a radiation-sensitive compound having a quinonediazide structure represented by the formula (1). (1), where R1 and R2 are a hydrogen atom, a 1,2-benzoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or the like, X, Y, Z1 and Z2 are a halogen atom substituted or unsubstituted C1 to 10 alkyl group, a halogen atom substituted or unsubstituted C6 to 20 aralkyl group or the like. COPYRIGHT: (C)2015,JPOandINPIT