17933-85-6Relevant articles and documents
Diphenylchlorosilanes preparation containing phenyl vinyl organic silicon sealed end medicinal preparation method
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Paragraph 0035; 0036, (2018/11/03)
The invention discloses a method for preparing an organic silicon end-capping reagent containing phenyl vinyl by using a grignard method. The method is characterized by comprising the following steps: (1) reacting chlorobenzene or bromobenzene with magnes
COMPOSITION FOR RESIST UNDERLAYER FILM AND PROCESS FOR PRODUCING SAME
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, (2010/06/22)
A composition for a resist underlayer film is provided. The composition has excellent storage stability and can form a resist underlayer film which has excellent adhesion to a resist film, can improve reproducibility of a resist pattern and is resistant to an alkaline liquid used in development and to oxygen asking during the removal of a resist. The composition comprises a hydrolyzate and/or a condensate of a silane compound of the following formula (A), [in-line-formulae]R1bR2cSi (OR3)4-a??(A)[/in-line-formulae] wherein R1 is a monovalent organic group having at least one unsaturated bond, R2 individually represents a hydrogen atom, a halogen atom or a monovalent organic group, R3 individually represents a monovalent organic group, R1 is a group other than OR3, a is an integer of 1 to 3, b is an integer of 1 to 3, and c is an integer of 0 to 2, provided that a=b+c.