20602-03-3

Basic information

• Product Name: 4'-hydroxycyclohexylcyclohexan-4-one
• Synonyms: 4'-hydroxycyclohexylcyclohexan-4-one
• CAS NO: 20602-03-3
• Molecular Weight: 196.29
• Mol File: 20602-03-3.mol
• Article Data: 2

Chemical Properties

• CAS DataBase Reference: 4'-hydroxycyclohexylcyclohexan-4-one(CAS DataBase Reference)
• NIST Chemistry Reference: 4'-hydroxycyclohexylcyclohexan-4-one(20602-03-3)
• EPA Substance Registry System: 4'-hydroxycyclohexylcyclohexan-4-one(20602-03-3)

Safety Data

• Hazardous Substances Data: 20602-03-3(Hazardous Substances Data)

Upstream product

• 92-88-6 4,4'-Dihydroxybiphenyl 
• 7335-42-4 trans-4-cyclohexylcyclohexanol 
• 92-51-3 cyclohexylcyclohexane 
• 46310-14-9 4,4'-e,e-cyclohexylcyclohexanediol 
• 56309-94-5 8-(4-oxocyclohexyl)-1,4-dioxaspiro[4.5]decane 
• 23391-99-3 4,4'-bicyclohexanone 

Relevant articles and documents

SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN

PROBLEM TO BE SOLVED: To provide a salt capable of producing a resist pattern with a good mask error factor (MEF), and a resist composition containing the salt. SOLUTION: The salt represented by formula (I), an acid generator, and the resist composition containing the same are provided. [In the formula, Q1 and Q2 each represent a fluorine atom, a perfluoroalkyl group or the like; R1 and R2 each represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group or the like; z represents an integer of 0-6; X1 represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-; L1 represents a single bond or a saturated hydrocarbon group; A1 represents an optionally substituted divalent alicyclic hydrocarbon group; Ra represents an optionally substituted alicyclic hydrocarbon group, and -CH2- contained in the group may be substituted with -O-, -S-, -SO2- or -CO-, provided that at least one -CH2- contained in the alicyclic hydrocarbon group is substituted with -O- or -CO-; and Z+ represents an organic cation.] SELECTED DRAWING: None COPYRIGHT: (C)2020,JPOandINPIT