Angewandte
Chemie
DOI: 10.1002/anie.201002004
Microreactors
Monolithic and Flexible Polyimide Film Microreactors for Organic
Microchemical Applications Fabricated by Laser Ablation**
Kyoung-Ik Min, Tae-Ho Lee, Chan Pil Park, Zhi-Yong Wu, Hubert H. Girault, Ilhyong Ryu,
Takahide Fukuyama, Yu Mukai, and Dong-Pyo Kim*
There is a growing interest in innovative chemical synthesis in
microreactors owing to the potential for high efficiency,
There are many fabrication techniques available for
microfluidic devices. Of these, laser ablation is convenient
to use for polymer chips. The whole microfabrication
[1]
[6]
selectivity, and yield. In microfluidic systems, the low-
volume spatial and temporal control of reactants and
products offers a novel method for chemical manipulation
process could be completed in a few minutes instead of the
days that are needed for wet photolithography processes. It is
well known that polyimide (PI) offers advantages over other
polymers, such as excellent chemical and thermal stability and
[
2]
and product generation. Glass, silicon, poly(dimethylsil-
oxane) (PDMS), and poly(methylmethacrylate) (PMMA)
have been used for the fabrication of miniaturized devices.
Fabrication with glass or silicon substrates requires relatively
complex processes, and the fabrication costs are high.
Relatively cheap polymers such as PDMS or PMMA are
not suitable for application in organic chemical processes
[
7]
low water uptake. Recently Barrett et al. reported fabrica-
[8]
tion of PI-based microfluidic devices by laser ablation. The
devices were used for X-ray scattering experiments to yield a
better spatial resolution for structural measurements. How-
ever, there has been no attempt to demonstrate the potential
advantages of PI-based microreactors for chemical syntheses.
Herein, we introduce a monolithic and flexible PI film
microreactor for organic synthesis. Mixing units, such as a
staggered herringbone pattern on the channel surface, can
easily be built into the reactor during the fabrication. The film
microreactors were readily fabricated within several tens of
minutes by ablation with either a 193 nm excimer laser (ArF)
or a 355 nm UV laser. The excellent stability of the fabricated
microreactors was successfully demonstrated by performing
five chemical reactions under various harsh conditions. The
simple and economical laser fabrication process and the facile
adhesive sealing step facilitate mass production of the flexible
PI film microfluidic devices for various microchemical
applications. Furthermore, these devices could provide a
platform for integrating microfluidic and electronic compo-
nents that are necessary for a micro total analysis system
[3]
owing to their low chemical stability and easy swelling.
Therefore, there is a strong demand for economical organic-
solvent-resistant materials that can be used for easy fabrica-
tion of microfluidic systems with reliable durability. Our
group has recently reported novel polymer microreactors for
organic syntheses, which involve two kinds of inorganic
polymers that are manipulated in relatively simple micro-
[
4]
fabrication processes. The improved solvent resistance
allowed good performance in organic reactions, except in
chlorinated solvents such as dichloromethane. Nevertheless,
the bonding step was somewhat tricky and had a low rate of
success. Alternatively, a monolithic thin-film microreactor
can be used for applications in organic synthesis, which allows
integration of electrodes, heaters, light-emitting diodes, and
[5]
various electronics.
(
m-TAS).
[
8]
[
*] K. I. Min, T. H. Lee, Dr. C. P. Park, Prof. D. P. Kim
National Creative Research Center of
Applied Microfluidic Chemistry, Chungnam National University
Daejeon, 305-764 (South Korea)
Fax: (+82)42-823-6665
E-mail: dpkim@cnu.ac.kr
As described in the literature, photoablation could be
performed either dynamically by continuous moving and
shooting of laser pulses to generate the channel or statically
by shooting on specific spots assigned by the controlling
[
6]
program. As shown in Figure 1b, two types of microchannel
designs, ArF and UV, were fabricated using the ArF excimer
laser with a metal mask and a UV laser with a 25 mm diameter
beam spot. Finally, 4 cm long ArF-type microchannels were
ablated on the smooth PI film (ArF-1 type) or on a grooved
surface with a staggered herringbone (SH) pattern (ArF-SH
type). UV-type microchannels 53 cm long were directly
ablated along the channel (UV-1 type) or across the channel
Prof. Z. Y. Wu
Research Center for Analytical Science
Northeastern University, 110819, Shenyang (China)
Prof. H. H. Girault
Laboratoire d’Electrochimie Physique et Analytique
EPFL SB ISIC LEPA, 1015 Lausanne (Switzerland)
Prof. I. Ryu, Dr. T. Fukuyama, Y. Mukai
Department of Chemistry, Graduate School of Science
Osaka Prefecture University, Sakai, Osaka, 599-8531 (Japan)
(UV-2 type) in a repeated scanning mode, finally generating
the line-grooved microchannels. The SH pattern was also
grooved statically along the beginning part of the channel
[
**] This research was supported by the Creative Research Initiatives
(
CRI) project R16-2008-138-01001-0 (2008) funded by the Korean
[9]
(UV-SH type).
Ministry of Education, Science and Technology. We thank Valerie
Devaud for her technical support in preparation of the herringbone
mask. I.R. and T.F. thank JSPS and MCPT for funding.
In general, it is reported that laser irradiation ablates by
photochemical decomposition of chemical bonds in the
polymer as well as by photothermal evaporation or melt
expulsion. It is also known that the laser is strong enough to
[
6]
Angew. Chem. Int. Ed. 2010, 49, 7063 –7067
ꢀ 2010 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
7063