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Basic Information

Molecular Structure:
CAS No.:	7783-82-6
Name:	Tungsten hexafluoride
Article Data:	48

Formula:	F6W
Molecular Weight:	297.84
Synonyms:	Tungstenfluoride (WF6) (6CI,8CI); Hexafluorotungsten; Tungsten fluoride; Tungstenhexafluoride; Tungsten hexafluoride (WF6); Tungsten(6+) fluoride; Wolframhexafluoride
EINECS:	232-029-1
Density:	13.1 g/L, gas
Melting Point:	2 ºC
Boiling Point:	17 ºC
Flash Point:	°C
Solubility:	Decomposes in water
Appearance:	Colorless gas
Hazard Symbols:	TC
Risk Codes:	R23/24/25;R34
Safety:	26-36/37/39-45
Transport Information:	UN 2196 2
PSA:	0.00000
LogP:	2.52120

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Chemistry

IUPAC Name: Hexafluorotungsten
The MF of Tungsten hexafluoride (CAS NO.7783-82-6) is F₆W.

The MW of Tungsten hexafluoride (CAS NO.7783-82-6) is 297.83.
Synonyms of Tungsten hexafluoride (CAS NO.7783-82-6): Tungsten fluoride (WF6), (OC-6-11)- ; Tungsten hexafluoride ; Tungsten(VI) fluoride
Apperance: A toxic corrosive light yellow liquid or gas
Boiling point: 17.5 °C
Melting Point: 2.3 °C
Water Solubility: decomposes
Merck: 13,9885
EINECS: 232-029-1

Uses

Tungsten hexafluoride (CAS NO.7783-82-6) is used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition – upon decomposition, molecules of WF6 leave a residue of metallic tungsten. This layer serves as low-resistive metallic "interconnects."

Production

Tungsten hexafluoride is commonly produced by the exothermic reaction of fluorine gas with tungsten powder at a temperature between 350 and 400 °C:

W + 3 F₂ → WF₆

The gaseous product is condensed and separated by distillation from WOF₄, a common impurity. In a variation on the direct fluorination, the metal is placed in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a constant flow of WF₆ infused with a small amount of fluorine gas.
The fluorine gas in the above method can be substituted by ClF, ClF₃ or BrF₃. An alternative procedure for producing tungsten fluoride is to react tungsten trioxide (WO₃) with HF, BrF₃ or SF₄. Tungsten fluoride can also be obtained by conversion of tungsten hexachloride:

WCl₆ + 6 HF → WF₆ + 6 HCl or

WCl₆ + 2 AsF₃ → WF₆ + 2 AsCl₃ or

WCl₆ + 3 SbF₅ → WF₆ + 3 SbF₃Cl₂

Toxicity Data With Reference

Organism	Test Type	Route	Reported Dose (Normalized Dose)	Effect	Source
guinea pig	LC50	inhalation	500mg/m3 (500mg/m3)	SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION	"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
mouse	LC50	inhalation	1350mg/m3 (1350mg/m3)	SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION	"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.
rat	LC50	inhalation	1430mg/m3 (1430mg/m3)	SENSE ORGANS AND SPECIAL SENSES: OTHER: EYE LUNGS, THORAX, OR RESPIRATION: EMPHYSEMA LUNGS, THORAX, OR RESPIRATION: RESPIRATORY OBSTRUCTION	"Spravochnik po Toksikologii i Gigienicheskim Normativam Vol. -, Pg. 43, 1999.

Consensus Reports

Reported in EPA TSCA Inventory.

Safety Profile

A poison and corrosive liquid or gas.Safety information of Tungsten hexafluoride (CAS NO.7783-82-6):
Hazard Codes Toxic T,C
Risk Statements
23/24/25 Toxic by inhalation, in contact with skin and if swallowed
34 Causes burns
Safety Statements
26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36/37/39 Wear suitable protective clothing, gloves and eye/face protection
45 In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
RIDADR UN 2196 2.3
WGK Germany 3
RTECS YO7720000
Hazard Note Toxic/Corrosive
HazardClass 2.3

Standards and Recommendations

OSHA PEL: TWA 2.5 mg(F)/m³
ACGIH TLV: TWA 2.5 mg(F)/m³; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift; 5 mg(W)/m³; STEL 10 mg(W)/m³
DOT Classification: 2.3; Label: Poison Gas

Specification

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions. With a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions.