101258-60-0Relevant articles and documents
Alkyl diethylene triamine derivatives and a process of the preparation thereof
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Paragraph 0062-0064, (2019/03/20)
The present invention relates to a novel triamine derivative among amine derivatives which are useful as a ligand of an organic metal complex for semiconductor deposition, and to a preparing method thereof. The preparing method of the present invention comprises the steps of: preparing di-hydroxy di-ethylene amine represented by chemical formula 2; substituting a hydroxyl group (OH) of the di-hydroxy di-ethylene amine with a halogen group; and preparing an alkyl di-ethylene triamine derivative represented by chemical formula 1.COPYRIGHT KIPO 2019