1076189-45-1

Basic information

• Product Name: C₁₃H₉F₄O₄S^(1-)*C₁₈H₁₅S⁽¹⁺⁾
• Synonyms: C₁₃H₉F₄O₄S^(1-)*C₁₈H₁₅S⁽¹⁺⁾
• CAS NO: 1076189-45-1
• Molecular Weight: 600.655
• Mol File: 1076189-45-1.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₁₃H₉F₄O₄S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(CAS DataBase Reference)
• NIST Chemistry Reference: C₁₃H₉F₄O₄S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(1076189-45-1)
• EPA Substance Registry System: C₁₃H₉F₄O₄S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(1076189-45-1)

Safety Data

• Hazardous Substances Data: 1076189-45-1(Hazardous Substances Data)

Upstream product

• 1076189-43-9 2-naphthylmethyloxytetrafluoroethanesulfonic acid lithium salt 
• 3353-89-7 triphenylsulfonium bromide 

Relevant articles and documents

POSITIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, AND COMPOUND

A compound represented by general formula (I) shown below; and a polymeric compound having a structural unit (a0) represented by general formula (a0-1) shown below: wherein R1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; A represents a divalent hydrocarbon group of 2 or more carbon atoms which may have a substituent; B represents a divalent hydrocarbon group of 1 or more carbon atoms which may have a substituent; and R2 represents an acid dissociable, dissolution inhibiting group.