1172610-20-6

Basic information

• Product Name: triphenylsulfonium thiophene-2-sulfonate
• Synonyms: triphenylsulfonium thiophene-2-sulfonate
• CAS NO: 1172610-20-6
• Molecular Weight: 426.581
• Mol File: 1172610-20-6.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: triphenylsulfonium thiophene-2-sulfonate(CAS DataBase Reference)
• NIST Chemistry Reference: triphenylsulfonium thiophene-2-sulfonate(1172610-20-6)
• EPA Substance Registry System: triphenylsulfonium thiophene-2-sulfonate(1172610-20-6)

Safety Data

• Hazardous Substances Data: 1172610-20-6(Hazardous Substances Data)

Upstream product

• 3353-89-7 triphenylsulfonium bromide 

Relevant articles and documents

FLUORINE-FREE HETERAROMATIC PHOTOACID GENERATORS AND PHOTORESIST COMPOSITIONS CONTAINING THE SAME

Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193nm (ArF) imaging radiation.