12067-56-0 Usage
Chemical Properties
-325 mesh powder(s); used as a 99.5 or 99.95% material as a sputtering target in the fabrication of integrated circuits [ALF93] [CER91]
Check Digit Verification of cas no
The CAS Registry Mumber 12067-56-0 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 1,2,0,6 and 7 respectively; the second part has 2 digits, 5 and 6 respectively.
Calculate Digit Verification of CAS Registry Number 12067-56:
(7*1)+(6*2)+(5*0)+(4*6)+(3*7)+(2*5)+(1*6)=80
80 % 10 = 0
So 12067-56-0 is a valid CAS Registry Number.
InChI:InChI=1/3Si.5Ta
12067-56-0Relevant articles and documents
Myers, C. E.,Searcy, A. W.
, p. 526 - 528 (1957)
New group V metal containing precursors and their use for metal containing film deposition
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Page/Page column 9, (2008/06/13)
Compound of the formula (Ia): or of the formula (Ib): These new precursors are useful for pure metal, metallic oxide, oxynitride, nitride and/or silicide film deposition to make electrodes and/or high k layers, and/or copper diffusion barrier layers, etc...
