1265179-97-2Relevant academic research and scientific papers
Interface segregating fluoralkyl-modified polymers for high-fidelity block copolymer nanoimprint lithography
Voet, Vincent S. D.,Pick, Teresa E.,Park, Sang-Min,Moritz, Manuel,Hammack, Aaron T.,Urban, Jeffrey J.,Ogletree, D. Frank,Olynick, Deirdre L.,Helms, Brett A.
, p. 2812 - 2815 (2011)
Block copolymer (BCP) lithography is a powerful technique to write periodic arrays of nanoscale features into substrates at exceptionally high densities. In order to place these features at will on substrates, nanoimprint offers a deceptively clear path t
