1375105-01-3Relevant academic research and scientific papers
Base reactive photoacid generators and photoresists comprising same
-
Page/Page column 15; 16; 17, (2012/06/01)
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.
BASE REACTIVE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME
-
, (2012/06/01)
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.
