1408321-86-7Relevant academic research and scientific papers
Design and synthesis of a photoaromatization-based two-stage photobase generator for pitch division lithography
Hagiwara, Yuji,Mesch, Ryan A.,Kawakami, Takanori,Okazaki, Masahiro,Jockusch, Steffen,Li, Yongjun,Turro, Nicholas J.,Grant Willson
, p. 1730 - 1734 (2013/03/29)
The synthesis of a two-stage photobase generator (PBG) based on photoinduced aromatization is described. This material was designed for use in resolution-enhanced photolithography. Computer modeling predicts that a delay in the onset of base generation ca
