1415833-40-7

Upstream product

• 1379588-26-7 C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1415833-07-6 C₅H₅F₄O₄S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 73606-13-0 2-Allyloxy-1,1,2,2-tetrafluoro-ethanesulfonyl fluoride 
• 1328587-74-1 CH₃O₄S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1379588-15-4 C₁₄H₁₆N₂O₂ 
• 1402927-27-8 C₁₆H₁₉F₄O₈S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 56674-87-4 4-oxoadamantane-1-carboxylic acid 
• 425-61-6 2,2,3,3-tetrafluorobutane-1,4-diol 
• 1402927-29-0 C₂₁H₂₁S⁽¹⁺⁾*C₂₇H₃₁F₄O₁₀S^(1-) 

Relevant academic research and scientific papers

SALT, PHOTORESIST COMPOSITION AND METHOD FOR PRODUCING PHOTORESIST PATTERN

A salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, A1 represents a C1-C30 monovalent organic group, X1 represents a C1-C10 aliphatic hydrocarbon group where a hydrogen atom may be replaced by a hydroxy group, m1 and m2 independently each represent an integer of 1 to 4, and Z+ represents an organic cation.