18030-69-8Relevant academic research and scientific papers
METHODS AND APPARATUS FOR FORMING GASEOUS ORGANOSILICON COMPOUNDS
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Page/Page column 35-39, (2009/07/03)
The present application is directed to a method for producing, from a solid organosilane compound, a mixture of gaseous organosilicon compounds having a desired molar ratio, the method comprising the step of pyrolysing the solid organosilane while maintaining a predetermined pressure which is selected to provide the desired molar ratio of gaseous organosilicon compounds. Associated apparatus and control mechanisms are also disclosed.
