240482-96-6Relevant articles and documents
HYBRID ONIUM SALT
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Page 32, (2010/02/07)
The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provi
Sulfonium salt and its manufacturing method
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, (2008/06/13)
This invention relates to a sulfonium salt, including its manufacturing method, which is effectively used as a photoacid initiator or radical photoinitiator during polymerization and a photoacid generator, leaving the protection groups of organic compound