26846-58-2Relevant academic research and scientific papers
Compound, resin, and a method for manufacturing a resist pattern a resist composition (by machine translation)
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, (2020/01/31)
[A] producing a resist pattern having a good edge roughness (LER) compound, resin and resist composition. [Solution] a compound represented by formula (IB) or formula (IA), as a resin containing a structural unit derived from a resist composition. Formula (IA): CH2 =C (R1 ) - X1 - L1 (- OR3 ) (- OR4 ) (- OR5 ), Formula (IB): CH2 =C (R1 ) - X1 - L1 (- X2 - C (R2 )=CH2 ) (- OR3 ) (- OR4 ). [R1 And R2 The, H or a methyl group; X1 X and2 The, O - (=O) or - C; L1 The, substituted/unsubstituted C1 a-48 hydrocarbon group; R3 , R4 And R5 R (=O) [...] e C23 As a; R23 The, 1 - 6 alkyl group having carbon number F. ][Drawing] no (by machine translation)
COMPOUND, RESIN, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
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, (2020/02/14)
PROBLEM TO BE SOLVED: To provide a compound, a resin, and a resist composition capable of producing a resist pattern having good line edge roughness (LER). SOLUTION: The compound is represented by formula (IA) or formula (IB), and the resin and the resist composition contain a structural unit derived from the compound. (Formula IA): CH2=C(-R1)-X1-L1(-OR5)(-OR3)(-0R4). (Formula IB): CH2=C(-R1)-X1-L1(-X2-C(-R2)=CH2)(-OR3)(-0R4). [R1 and R2 each represent H or a methyl group; X1 and X2 each represent -C(=O)O- or the like; L1 represents a substituted/unsubstituted C1-48 hydrocarbon group; and R3, R4 and R5 each represent a C2-4 cyclic hydrocarbon group containing one O, which may have a saturated hydrocarbon group.] SELECTED DRAWING: None COPYRIGHT: (C)2020,JPOandINPIT
Process for the Preparation of (Meth)Acrylates of Tetra-Or Polyhydric Alcohols
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Page/Page column 3, (2008/12/07)
Process for the preparation of acrylic and methacrylic acid esters by transesterification of (meth)acrylic acid esters of the formula I: where R1 is H or CH3 and R2 is an alkyl radical having 1 to 40 carbon atoms, with alkanols which have four or more esterifiable hydroxyl groups, characterized in that 0.01 to 10% by weight, based on the total reaction mixture, of lithium amide catalysts are used as transesterification catalyst.
Acrylated diols
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, (2008/06/13)
Polymerizable esters of 2,2-bis(hydroxymethyl)-1,3--propanediol with acrylic and methacrylic acids and mixtures of acrylic or methacrylic acid and other organic carboxylic acids are disclosed. Polymers of these esters and mixture of esters are crosslinkable and useful in many applications, particularly in protective coatings.
