291-27-0

Usage

Class

Cyclosilanes

Physical state at room temperature

Colorless liquid

Solubility in water

Insoluble

Uses

a. Building block in the synthesis of other organic and inorganic compounds
b. Ligand in organometallic chemistry

Potential applications

a. Materials science
b. Catalysis

Chemical vapor deposition

Studied for potential use in the production of thin films in microelectronics and semiconductors

Upstream product

• 16538-69-5 1,1,3,3,5,5-hexachloro-1,3,5-trisilacyclohexane 
• 17861-41-5 1,1,3,3,5,5-hexamethoxy-1,3,5-trisilacyclohexane 
• 17955-67-8 1,1,3,3,5,5-hexaethoxy-1,3,5-trisilacyclohexane 

Relevant academic research and scientific papers

Improved synthesis and crystal structure of the parent 1,3,5-trisilacyclohexane

The crystal structure and an improved synthesis of 1,3,5-trisilacyclohexane are reported. The solid state structure is compared with the reported structure determined in the gas phase by gas electron diffraction (GED). 1,3,5-Trisilacyclohexane adopts a chair conformation in the solid state. The Si-C bond lengths as well as all angles of 1,3,5-trisilacyclohexane in the solid state have similar dimensions compared to the structure in the gaseous phase.

PRODUCTION METHOD, SIC-BASED FILM-FORMING MATERIAL, AND SIC-BASED FILM

PROBLEM TO BE SOLVED: To provide a high-yielding method for producing trisilacyclohexane useful as a SiC-based film forming material. SOLUTION: A method for producing 1,3,5-trisilacyclohexane represented by the following formula comprises reducing an alkoxytrisilacyclohexane derivative represented by the following formula with a reductant such as LiAlH4. SELECTED DRAWING: None COPYRIGHT: (C)2017,JPOandINPIT