31250-06-3Relevant academic research and scientific papers
Photocurable resin composition, dry film thereof, pattern forming method, and electrical/electronic part protective film
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, (2012/05/04)
A photocurable composition includes: (A) an epoxy group-containing polymer compound having repeating units represented by the following formula (1), where R1 to R4 are each a hydrocarbon group, m is an integer of 1 to 100, a, b, c and d are each 0 or a positive number, such that 0 (c+d)/(a+b+c+d) ≤ 1.0, and X and Y are each the formula (2) or (3), provided that at least one group of the formula (3) is present, (B) a photoacid generator represented by the formula (8) and (C) a solvent.
Resist composition and patterning process
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, (2010/02/17)
The present invention relates to: a resist composition such as a chemically amplified resist composition for providing an excellent pattern profile even at a substrate-side boundary face of resist, in addition to a higher resolution in photolithography for micro-fabrication, and particularly in photolithography adopting, as an exposure source, KrF laser, ArF laser, F2 laser, ultra-short ultraviolet light, electron beam, X-rays, or the like; and a patterning process utilizing the resist composition. The present invention provides a chemically amplified resist composition comprising one or more kinds of amine compounds or amine oxide compounds (except for those having a nitrogen atom of amine or amine oxide included in a ring structure of an aromatic ring) at least having a carboxyl group and having no hydrogen atoms covalently bonded to a nitrogen atom as a basic center.
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
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, (2010/04/23)
A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising recurring units containing a non-leaving hydroxyl group represented by formula (1) wherein R1 is H, methyl or trifluoromethyl, X is a single bond or methylene, m is 1 or 2, and the hydroxyl group attaches to a secondary carbon atom. The composition is improved in resolution when processed by lithography.
Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
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, (2008/06/13)
Novel tertiary (meth)acrylate compounds having a lactone structure are polymerizable into polymers having improved transparency, especially at the exposure wavelength of an excimer laser and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.
Coordination to RMg+ and RZn+ cations
Tang, Hui
, p. 4810 - 4819 (2008/10/08)
Addition of a second coordinating agent (coord*) to a solution of RM(coord)+A- (R = ethyl or neopentyl, M = Zn or Mg, A- = 1,2,3,4-tetraphenylcyclopentadienyl) can provide equilibrium mixtures of these compounds, coord, and RM(coord*)+A-. This exchange with RMg(coord)+ requires the addition of a small amount of R2Mg, but added R2Zn is not necessary for exchanges with RZn(coord)+. The equilibrium constants provide information about the relative abilities of different coordinating agents to coordinate to RM+ and reveal significant differences between coordination to RMg+ and RZn+. Reactions of RM(coord)+ with R′2M (R = ethyl or neopentyl for RMg(coord)+ and ethyl, isopropyl, tert-butyl, neopentyl, or p-methylphenyl for RZn(coord)+) provide equilibrium mixtures of these components, R′M(coord)+, and R2M. The equilibrium constants provide information about the effect of R on stability. An X-ray structure of p-methylphenylzinc(2,5,8,11-tetramethyl-2,5,8,11-tetraazadodecane)+ shows that just three of the N atoms are coordinated to Zn. The effects of coord, R, and metal on RM(coord)+ stability are discussed, and the abilities of coordinating agents to coordinate to RM+, to slow allylic isomerization of (CH2 double bond CMeCH2)2Zn, and to convert R2Zn to RZn(coord)+ are compared.
The macrobicyclic cryptate effect in the gas phase
Chen, Qizhu,Cannell, Kevin,Nicoll, Jeremy,Dearden, David V.
, p. 6335 - 6344 (2007/10/03)
The alkali cation (Li+, Na+, K+, Rb+, and Cs+) binding properties of cryptands [2.1.1], [2.2.1], and [2.2.2] were investigated under solvent-free, gas-phase conditions using Fourier transform ion cyclotron resonance mass spectrometry. The alkali cations serve as size probes for the cryptand cavities. All three cryptands readily form 1:1 alkali cation complexes. Ligand-metal (2:1) complexes of [2.1.1] with K+, Rb+, and Cs+, and of [2.2.1] with Rb+ and Cs+ were observed, but no 2:1 complexes of [2.2.2] were seen, consistent with formation of 'inclusive' rather than 'exclusive' complexes when the binding cavity of the ligand is large enough to accommodate the metal cation. Kinetics for 2:1 ligand-metal complexation, as well as molecular mechanics calculations and cation transfer equilibrium constant measurements, lead to estimates of the radii of the cation binding cavities of the cryptands under gas-phase conditions: [2.1.1], 1.25 ?; [2.2.1], 1.50 ?; [2.2.2], 1.65 ?. Cation transfer equilibrium studies comparing cryptands with crown ethers having the same number of donor atoms reveal that the cryptands have higher affinities than crowns for cations small enough to enter the cavity of the cryptand, while the crowns have the higher affinity for cations too large to enter the cryptand cavity. The results are interpreted in terms of the macrobicyclic cryptate effect: for cations small enough to fit inside the cryptand, the three-dimensional preorganization of the ligand leads to stronger binding than is possible for a floppier, pseudo-two-dimensional crown ether. The loss of binding by one ether oxygen which occurs as metal size increases for a given cryptand is worth approximately 25 kJ mol-1, and accounts for the higher cation affinities of the crowns for the larger metals. The Li+ affinity of 1,10-diaza-18-crown-6 is ~1 kJ mol-1 higher than that of 18-crown-6, while the latter has lower affinity than the former for all of the larger alkali cations (about 7 kJ mol-1 lower for Na+, and about 15 kJ mol-1 lower for K+, Rb+, and Cs+). The equilibrium measurements also allow the determination of relative free energies of cation binding for a number of crown ethers and cryptands. Molecular mechanics modeling with the AMBER force field is generally consistent with the experiments.
The Complexation of Alkaline Cations by Crown Ethers and Cryptand in Acetone
Buschmann, H.-J.,Cleve, E.,Schollmeyer, E.
, p. 569 - 578 (2007/10/02)
Stability constants and thermodynamic values for the complex formation of alkali ions by crown ethers, diaza crown ethers and cryptands have been measured by means of potentiometric and calorimetric titrations in acetone as solvent.The interactions between the ligands and solvent molecules play an important role for the complex formation.Cryptands form the most stable complexes with alkali ions if inclusion complexes are formed.Even in the case that the salts are not completely dissociated in acetone the presence of ion pairs does not influence the calculated values of the stability constants.
Solvent Dependence of Kinetics and Equilibria of Thallium(I) Cryptates in relation to the Free Energies of Solvation of Thallium(I)
Cox, Brian G.,Stroka, Jadwiga,Schneider, Irmgard,Schneider, Hermann
, p. 187 - 198 (2007/10/02)
Stability constant and dissociation rate constants of thallium(I) cryptates have been measured in several solvents at 25 deg C.The Tl+ cryptates are more stable and less sensitive to ligand cavity size than the corresponding complexes of the al
Complex Formation of Alkaline-Earth Cations with Crown Ethers and Cryptands in Methanol Solutions
Buschmann, Hans-Jurgen
, p. 453 - 462 (2007/10/02)
The complexation of alkaline-earth cations by different crown ethers, azacrown ethers, and cryptands has been studied in methanol solutions by means of calorimetric and potentiometric titratios.The smallest monocyclic ligands examined form 2:1 complexes (ratio of ligand to cation) with cations which are too large to fit into the ligand cavity.With the smallest cryptand, only Sr2+ and Ba2+ ions are able to form exclusive complexes.In the case of the reaction of cryptand (211) with Ca2+, a separate estimation of stability constants for the formation of exclusive and inclusive complexes was possible for the first time.Higher values for stability constants are found for the reaction of alkaline-earth cations with cryptands compared to the reaction with alkali ions.This increase is only caused by favorable entropic contributions.
Synthesis of Simple Cryptands under High Pressure
Pietraszkiewicz, Marek,Salanski, Piotr,Jurczak, Janusz
, p. 433 - 436 (2007/10/02)
Simple N,N'-dimethyl diaza-crown ethers react with bis(2-iodoethyl)-ether (2a) and 1,2-bis(2-iodoethoxy)ethane (2b) under high pressure (10 kbar) to give bis-quaternary salts which are demethylated in good yield by triphenylphosphine in boiling dimethylformamide yielding simple cryptands.
