313-50-8Relevant articles and documents
Catalytic and autocatalytic mechanisms of acid amplifiers for use in EUV photoresists
Kruger, Seth A.,Higgins, Craig,Cardineau, Brian,Younkin, Todd R.,Brainard, Robert L.
scheme or table, p. 5609 - 5616 (2011/12/15)
Twelve fluorinated acid amplifiers (AAs) were synthesized and studied for use in photoresists exposed to 13.5 nm, extreme ultraviolet (EUV) light. Acid amplifiers are compounds that decompose in the presence of acid to generate more acid via catalytic or autocatalytic mechanisms. These AAs are composed of a body, trigger, and an acid precursor. Thermal decomposition rates of solutions of the AAs in C6D6/m-ethylphenol (50/50 wt %) at 100 °C were monitored by 19F NMR with and without 1.2 equiv. of 2,4,6-tri-t-butylpyridine. All of the AAs in the presence of base decompose according to first-order kinetics with rate constants kBase. The rate constants, kBase, at various temperatures yielded the activation parameters ΔH?, ΔS?, and ΔG?. The enthalpy of activation, ΔH, ?, was in a narrow range of 16.6-19.1 (kcal/mol), whereas the entropy of activation, ΔS?, spanned from 0 to -12 (cal/(mol K)). When acid is allowed to build up in solution (in the absence of base), six of the AAs with tertiary triggers (Body-3) decompose autocatalytically, but the six with secondary triggers (Body-2) are unaffected. Although Body-2 AAs do not decompose autocatalytically, nonaflate acid does catalyze their decomposition. Lithographic evaluation showed that some AAs are capable of simultaneously improving the resolution, line-edge-roughness, and sensitivity of a control EUV photoresist. This simultaneous improvement was quantified using the Z-Parameter. The AAs investigated here were found to improve the Z-Parameter by as much as a factor of 3.
SYNTHESIS OF [18F] FLUOROMETHYL BENZENE USING BENZYL PENTAFLUOROBENZENESULFONATE
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Page/Page column 5; 9; 12-13, (2008/12/07)
The present invention discloses the reactivity of ponytail ( PT ) sulfonates as leaving groups in nucleophilic fluorination reactions. The results showed that using a pentafluorobenzenesulfonate precursor is a suitable leaving group for n. c. a. nucleophilic 18F-fluorination in synthesis of [18F]fluoromethyl benzene, wherein this is a suitable leaving group for 18F-labeling with moderate reactivity. The PT-precursor seems to be quite stable. In an attempt to purify the crude 18F-labeled product using fluorous solid phase extraction (F-SPE), the radio labeled impurities decreased significantly. This provides an opportunity for utilizing PT methodology in both simple and fast purification methods.
Studies of the Solvolysis of 2-Adamantyl Pentafluorobenzenesulfonate: A YPFBS Scale
Hawkinson, David C.,Kevill, Dennis N.
, p. 3857 - 3860 (2007/10/02)
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