328087-85-0Relevant articles and documents
Alkyl-substituted tetracyclododecenecarboxylic acid esters, (meth)acrylic acid addition products thereof, and methods for producing the same
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, (2008/06/13)
The present invention provides alkyl-substituted tetracyclododecenecarboxylic acid esters presented by the general formula (I): wherein R1 is an alkyl group having 1 to 4 carbon atoms and R2 is a hydrocarbon group having 1 to 12 carbon atoms. Further, the represent invention provides (meth)acrylic acid addition products of alkyl-substituted tetracyclododecenecarboxylic acid esters represented by the general formula (II): wherein R1 is an alkyl group having 1 to 4 carbon atoms, R2 is a hydrocarbon group having 1 to 12 carbon atoms, and R3 is a hydrogen atom or a methyl group.
Chemical amplifying type positive resist composition
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, (2008/06/13)
A chemical amplifying type positive resist composition, excellent in balance of performance of resolution and sensitivity, having high dry etching resistance and comprising; a resin having a polymerization unit derived from a monomer represented by the following formula (I): wherein R1 and R2 independently represent hydrogen or an alkyl group having 1 to 4 carbons, and R3 represents hydrogen or a methyl group, the resin being insoluble in alkali itself but becoming alkali-soluble due to the action of an acid; and an acid generating agent is provided.
Alkyladamantyl esters and their preparation
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, (2008/06/13)
A novel norbornene carboxylate compound and a method of producing the same are provided. The norbornene carboxylate compound is 2-alkyl-2-adamantyl 5-norbornene-2-carboxylate represented by formula (1): wherein R is methyl or ethyl.
2-alkyl-2-adamantyl 5-norbornene-2-carboxylates and method of producing the same
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, (2008/06/13)
A novel norbornene carboxylate compound and a method of producing the same are provided. The norbornene carboxylate compound is 2-alkyl-2-adamantyl 5-norbornene-2-carboxylate represented by formula (1): wherein R is methyl or ethyl.