Tris(hexamethyldisilazan)titanium, also known as THTT, is a chemical compound that features a titanium atom connected to three hexamethyldisilazan ligands. It is recognized for its unique properties, such as its specific reactivity and stability, which make it a valuable precursor for the creation of titanium-based thin films and other advanced materials in the semiconductor and microelectronics industry.
37512-29-1
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Basic information
- Product Name: Tris(hexamethyldisilazan)titanium
- Synonyms: Tris(hexamethyldisilazan)titanium
- CAS NO:37512-29-1
- Molecular Formula: C18H57N3Si6Ti
- Molecular Weight: 532.04528
- EINECS: N/A
- Product Categories: N/A
- Mol File: 37512-29-1.mol
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Chemical Properties
- Melting Point: N/A
- Boiling Point: N/A
- Flash Point: N/A
- Appearance: /
- Density: N/A
- Refractive Index: N/A
- Storage Temp.: N/A
- Solubility: N/A
- CAS DataBase Reference: Tris(hexamethyldisilazan)titanium(CAS DataBase Reference)
- NIST Chemistry Reference: Tris(hexamethyldisilazan)titanium(37512-29-1)
- EPA Substance Registry System: Tris(hexamethyldisilazan)titanium(37512-29-1)
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Safety Data
- Hazard Codes: N/A
- Statements: N/A
- Safety Statements: N/A
- WGK Germany:
- RTECS:
- HazardClass: N/A
- PackingGroup: N/A
- Hazardous Substances Data: 37512-29-1(Hazardous Substances Data)
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37512-29-1 Usage
Uses
Used in Semiconductor and Microelectronics Industry:Tris(hexamethyldisilazan)titanium is used as a precursor for the deposition of titanium-based thin films. It is favored for its ability to form highly uniform and conformal coatings, which are essential for the production of sophisticated electronic devices.
Used in the Synthesis of Titanium-Containing Polymers:
THTT is utilized in the synthesis of titanium-containing polymers, contributing to the development of new materials with enhanced properties for various applications.
Used as a Catalyst in Organic Transformations:
Due to its specific reactivity, Tris(hexamethyldisilazan)titanium serves as a catalyst in various organic transformations, facilitating chemical reactions that are crucial in the fabrication of cutting-edge materials and technologies.
Check Digit Verification of cas no
The CAS Registry Mumber 37512-29-1 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 3,7,5,1 and 2 respectively; the second part has 2 digits, 2 and 9 respectively.Calculate Digit Verification of CAS Registry Number 37512-29:
(7*3)+(6*7)+(5*5)+(4*1)+(3*2)+(2*2)+(1*9)=111
111 % 10 = 1
So 37512-29-1 is a valid CAS Registry Number.
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37512-29-1Downstream Products
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Tris(hexamethyldisilazan)titanium
