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TETRAKIS(ETHYLMETHYLAMINO)SILANE is a colorless liquid with a strong ammonia-like odor, used in chemical vapor deposition processes to deposit thin films of silicon nitride and other silicon-containing materials. It is highly reactive with water and air, and poses a fire and explosion hazard due to its flammable nature and violent reaction with oxidizing agents. Classified as a hazardous substance, it requires careful handling and storage to prevent accidents and exposure to its toxic fumes.

477284-75-6

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477284-75-6 Usage

Uses

Used in Chemical Vapor Deposition:
TETRAKIS(ETHYLMETHYLAMINO)SILANE is used as a precursor in chemical vapor deposition processes for depositing thin films of silicon nitride and other silicon-containing materials. Its reactivity with water and air allows for the formation of high-quality, uniform coatings on substrates.
Used in Semiconductor Industry:
In the semiconductor industry, TETRAKIS(ETHYLMETHYLAMINO)SILANE is used for the production of integrated circuits and other electronic devices. Its ability to create high-quality, uniform coatings on substrates makes it a valuable component in the manufacturing process.

Check Digit Verification of cas no

The CAS Registry Mumber 477284-75-6 includes 9 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 6 digits, 4,7,7,2,8 and 4 respectively; the second part has 2 digits, 7 and 5 respectively.
Calculate Digit Verification of CAS Registry Number 477284-75:
(8*4)+(7*7)+(6*7)+(5*2)+(4*8)+(3*4)+(2*7)+(1*5)=196
196 % 10 = 6
So 477284-75-6 is a valid CAS Registry Number.

477284-75-6SDS

SAFETY DATA SHEETS

According to Globally Harmonized System of Classification and Labelling of Chemicals (GHS) - Sixth revised edition

Version: 1.0

Creation Date: Aug 19, 2017

Revision Date: Aug 19, 2017

1.Identification

1.1 GHS Product identifier

Product name N-methyl-N-tris[ethyl(methyl)amino]silylethanamine

1.2 Other means of identification

Product number -
Other names -

1.3 Recommended use of the chemical and restrictions on use

Identified uses For industry use only.
Uses advised against no data available

1.4 Supplier's details

1.5 Emergency phone number

Emergency phone number -
Service hours Monday to Friday, 9am-5pm (Standard time zone: UTC/GMT +8 hours).

More Details:477284-75-6 SDS

477284-75-6Upstream product

477284-75-6Downstream Products

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