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TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is a coordination compound that serves as a crucial precursor in the metal organic chemical vapor deposition (MOCVD) process for the creation of tantalum nitride thin films. TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is distinguished by its high thermal stability and is composed of tantalum, nitrogen, carbon, and hydrogen atoms. It is pivotal in the synthesis of advanced materials with unique electrical and mechanical properties, making it an essential reagent in materials science.

67313-80-8

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67313-80-8 Usage

Uses

Used in Electronics Industry:
TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is utilized as a precursor in the production of electronic components, specifically for the formation of tantalum nitride thin films. These films are integral to the development of various electronic devices due to their unique properties.
Used in Semiconductor Industry:
In the semiconductor industry, TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is employed as a key component in the fabrication of integrated circuits and other electronic devices. Its role in the MOCVD process ensures the creation of high-quality tantalum nitride thin films, which are vital for the performance and reliability of these devices.
Used in Thin Film Coating Applications:
TRIS(DIETHYLAMINO)(ETHYLIMINO)TANTALUM(& is also used as a precursor for the synthesis of thin film coatings with specific electrical and mechanical properties. These coatings are applied in various applications to enhance the performance and durability of the coated surfaces.

Check Digit Verification of cas no

The CAS Registry Mumber 67313-80-8 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 6,7,3,1 and 3 respectively; the second part has 2 digits, 8 and 0 respectively.
Calculate Digit Verification of CAS Registry Number 67313-80:
(7*6)+(6*7)+(5*3)+(4*1)+(3*3)+(2*8)+(1*0)=128
128 % 10 = 8
So 67313-80-8 is a valid CAS Registry Number.

67313-80-8SDS

SAFETY DATA SHEETS

According to Globally Harmonized System of Classification and Labelling of Chemicals (GHS) - Sixth revised edition

Version: 1.0

Creation Date: Aug 20, 2017

Revision Date: Aug 20, 2017

1.Identification

1.1 GHS Product identifier

Product name diethylazanide,ethyliminotantalum

1.2 Other means of identification

Product number -
Other names -

1.3 Recommended use of the chemical and restrictions on use

Identified uses For industry use only.
Uses advised against no data available

1.4 Supplier's details

1.5 Emergency phone number

Emergency phone number -
Service hours Monday to Friday, 9am-5pm (Standard time zone: UTC/GMT +8 hours).

More Details:67313-80-8 SDS

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