691410-52-3Relevant academic research and scientific papers
FLUORINE-CONTAINING VINYL ETHERS, THEIR POLYMERS, AND RESIST COMPOSITIONS USING SUCH POLYMERS
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Page 18, (2008/06/13)
The invention relates to a fluorine-containing vinyl ether represented by the formula (1), wherein R represents an organic group containing at least one fluorine atom and a cyclic structure. The invention further relates to a fluorine-containing copolymer containing (a) a first unit derived from a first monomer that is a fluorine-containing vinyl ether represented by the formula (8) where R1 is -H or a C1-C8 alkyl group that optionally contains an oxygen atom; and (b) a second unit derived from a second monomer that is at least one selected from acrylic esters and methacrylic esters.
