69618-49-1

Basic information

• Product Name: 2,8,9-Trioxa-5-aza-1-silabicyclo[3.3.3]undecane, 1-ethyl-3-phenyl-
• CAS NO: 69618-49-1
• Molecular Formula: C14H21NO3Si
• Molecular Weight: 279.411
• Mol File: 69618-49-1.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: 2,8,9-Trioxa-5-aza-1-silabicyclo[3.3.3]undecane, 1-ethyl-3-phenyl-(CAS DataBase Reference)
• NIST Chemistry Reference: 2,8,9-Trioxa-5-aza-1-silabicyclo[3.3.3]undecane, 1-ethyl-3-phenyl-(69618-49-1)
• EPA Substance Registry System: 2,8,9-Trioxa-5-aza-1-silabicyclo[3.3.3]undecane, 1-ethyl-3-phenyl-(69618-49-1)

Safety Data

• Hazardous Substances Data: 69618-49-1(Hazardous Substances Data)

Upstream product

• 5314-55-6 ethyltrimethoxysilane 
• 4388-18-5 2-amino-1-phenylethanol 

Relevant articles and documents

ETCHANT COMPOSITION, METHOD OF ETCHING INSULATING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SILANE COMPOUND

An etchant composition includes a silane compound represented by the following Chemical Formula 1: wherein R1 to R6 are independently hydrogen, halogen, a substituted or unsubstituted C1-C20 hydrocarbyl group, a phenyl group, a C1-C20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri (C1-C20) alkylsilyl group, a phosphoryl group, or a cyano group, L is a direct bond or C1-C3 hydrocarbylene, A is an n-valent radical, and n is an integer of 1 to 4.