76392-49-9Relevant academic research and scientific papers
UV Excimer Laser Photoproducts from Absorbing and Transparent Surfaces Covered by Aluminum Alkyl Adsorbates
Zhang, Y.,Stuke, M.
, p. 4503 - 4507 (2007/10/02)
Neutral atomic and molecular species, generated upon the interaction of UV excimer laser light with Al-alkyl/substrate interfaces, are detected by single-shot dye laser mass spectroscopy.The molecules studied at 308, 248, and 193 nm are trimethylaluminum (TMA), triethylaluminum (TEA), and triisobutylaluminum (TIBA).The substrate is either n-type Si(100) or SiO2 (quartz).The major aluminum-containing species detected are Al atoms and AlH and AlCH3 molecules.Their relative abundance is shown to depend. on the adsorbate molecule and the wavelength chosen.Marked differences are observed between the case of the Al-alkyls photolyzed under collision-free conditions in the gase phase and when these molecules are adsorbed to a surface.
