7803-62-5 Usage
Uses
Used in Electronics Industry:
Silicon tetrahydride is used as a source of hyperpure silicon for semiconductors. It is also used for doping of solid-state devices and for preparing semiconducting silicon for the electronics industry.
Used in Silicon Production:
Silane, pure or doped, is used to prepare semiconducting silicon by thermal decomposition at temperatures above 600°C. Gaseous dopants such as germane, arsine, or diborane may be added to the silane at very low concentrations in the epitaxial growing of semiconducting silicon for the electronics industry.
Air & Water Reactions
Highly flammable. Pure state ignites in air, the first seven to eight of the series 6H2n+1 ignite spontaneously in air at room temperature or slightly elevated temperatures [Mellor 1:376 1946-47]. Slowly reacts with water to form silicon hydroxides and hydrogen gas.
Reactivity Profile
Slowly reacts with water to form silicon hydroxides and hydrogen gas [Hydrides of the Elements of Main Groups I - IV 1971 p.513]. Silicon tetrahydride burns in contact with bromine, chlorine or covalent chlorides (carbonyl chloride, antimony pentachloride, tin(IV) chloride). Even traces of the free halogens may cause violent explosions, when handling Silicon tetrahydride, extreme caution should be taken, [Mellor, 1940, Vol. 6, 220]. Mixtures of Silicon tetrahydride and nitrogen oxides, nitrous oxide, detonate very easily, [Chem. Abs., 1990, 112, 121711].
Hazard
Dangerous fire risk, ignites spontaneously
in air. Strong irritant to tissue, skin and upper res-
piratory tract.
Health Hazard
Very little information has been published onthe toxicology of Silicon tetrahydride. The acutetoxicity of silane is much less than that ofgermane. Among the hydrides of group IVBelements, the toxicity of silane falls betweenthe nontoxic methane and moderately toxicgermane. Inhalation of the gas can causerespiratory tract irritation. A 4-hour exposureto a concentration of about 10,000 ppm in airproved fatal to rats.
Fire Hazard
EXTREMELY FLAMMABLE. Will be easily ignited by heat, sparks or flames. Will form explosive mixtures with air. Silicon tetrahydride will ignite spontaneously in air. Vapors from liquefied gas are initially heavier than air and spread along ground. Vapors may travel to source of ignition and flash back. Cylinders exposed to fire may vent and release flammable gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket.
Contact allergens
Various silane derivatives are used as bonding agents between glass and the resin used as a coating agent of glass filaments. Organosilanes have been implicated as sensitizers in workers at a glass filament manufactory.
Safety Profile
Mildly toxic by inhalation. Silanes are irritating to skin, eyes, and mucous membranes. Easily ipted in air. Explosive reaction or ignition on contact with halogens or covalent halides (e.g., bromine, chlorine, carbonyl chloride, antimony pentachloride, tin(Iv> chloride). Ignites in oxygen. Can react with oxidizers. It may self-explode. When heated to decomposition it burns or explodes.
Potential Exposure
Silane is used as a doping agent for solid-state devices; as a source of silicon for semiconductors; and in the production of amorphous silicon.
Physiological effects
The major hazards ofsilane stem from its ability
to combust spontaneously and its irritating
properties. Silane reacts with water to form silicic acid and therefore can cause irritation ofthe
eyes, mucous membranes, and respiratory tract.
Inhalation may result in headache, nausea, and
irritation of the upper respiratory tract. The offensive odors of silane should be taken as a warning signal for the presence of dangerous
concentrations.
ACGIH recommends a Threshold Limit
Value-Time-Weighted Average (TLV-TWA)
of 5 ppm (6.6 mg/m3) for silane. The TLV-TWA is the time-weighted average concentration for a normal 8-hour workday and a 40-hour
workweek, to which nearly all workers may be
repeatedly exposed, day after day, without adverse effect.
Environmental Fate
Silane is a colorless transparent gas, heavier than air. It is
odorless when greatly diluted, but extremely noxious when
concentrated, with a sharp, repulsive smell, somewhat similar
to that of acetic acid. Its silicon–hydrogen bond is much
weaker, and accordingly more reactive, than a carbon–
hydrogen single bond. It is not only inflammable in air at
concentrations between 1% and 96% v/v, producing particulate
silicon oxides and hydrogen gas, but is pyrophoric. Above
420°C silane decomposes, releasing hydrogen and depositing
high-purity silicon, which leads to some of its principal
applications. It also reacts avidly with oxidants; for example,
contact with even trace amounts of free halogens may cause
violent explosions. It is insoluble in water, and does not react
with water under normal conditions, but in the presence of
even minute traces of hydroxyl ion reacts to evolve hydrogen
gas and form corrosive silicic acid or hydrated silicon dioxide.
The reaction with water is further accelerated by organic or
inorganic bases. Silane is fully biodegradable, and will not
bioaccumulate.
storage
With the proper precautions, silane and silane
mixtures can be handled safely to avoid contact
with air at all times. Almost all recommendations are directed at not violating this one rule.
Specific precautions that should be observed in
handling silane are as follows:
? Before using silane, read all equipment instructions, cylinder labels, data sheets, and
other associated information pertaining to
silane and its use.
? Handle silane in a well-ventilated area
while avoiding the presence of combustible materials.
? Store silane at positive pressures.
? Do not condense silane by avoiding temperatures of-148°F (-100°C) or less.
Condensation ofsilane runs the risk of
leaks developing with subsequent sucking
back of air into the system, forming explosive mixtures.
? Do not use silane in conjunction with
heavy-metal halides or free halogens, with
which it will react violently. Care should
be taken that all components of any
silane-handling system are purged offree
halogens, which might exist from degreasing agents or chlorinated hydrocarbons.
? Evacuate and thoroughly pressure check
all systems, preferably with helium, for
leaks at pressures two to three times the
anticipated working pressure. However, do
not exceed the system design pressure. In
addition, a regular leak test procedure and
testing schedule should be instituted and followed as part of normal preventive
maintenance.
? Ground all equipment and lines using
silane.
? Use an alternate vacuum and inert gas
purge ofthe system to purge all air out of
the system after it has been leak checked
or opened for any reason.
? When pressurizing equipment with silane
or a silane mixture, open the cylinder valve
slowly. All other equipment adjustments of
regulators, needle valves, etc. should also
be made slowly.
? Before disconnecting any system that has
had silane in it, thoroughly purge the system ofsilane with an inert gas. Any portion of a system that is dead-ended or allows "pocketing" ofsilane should be
treated by considerable purging, on the order often times the trapped volume.
? Vent silane or silane mixtures through
small diameter pipe or tubing, ending under a shallow water seal to prevent back
diffusion ofair. Venting should be to an
area designed for silane disposal, preferably by burning. Concentrations even in the
low percentage range are dangerous and
should not be exposed directly to air.
Silane can also be vented by diluting with
inert gas to prevent ignition upon discharge to the atmosphere.
In addition, all precautions necessary for the
safe handling of any toxic flammable gas must
be observed.
Shipping
UN2203 Silane, Hazard Class: 2.1; Labels: 2.1-Flammable gas. Cylinders must be transported in a secure upright position, in a well-ventilated truck. Protect cylinder and labels from physical damage. The owner of the compressed gas cylinder is the only entity allowed by federal law (49CFR) to transport and refill them. It is a violation of transportation regulations to refill compressed gas cylinders without the express written permission of the owner.
Incompatibilities
An extremely flammable gas. Forms explosive mixture with air; may spontaneously ignite in air. A strong reducing agent. Reacts slowly with water forming silicon hydroxides and flammable hydrogen gas. Reacts with oxidizing agents; halogens , potassium hydroxide solution. Explodes in oxygen. Decomposes on heating or on burning producing silicon and hydrogen.
Waste Disposal
Return refillable compressed gas cylinders to supplier. Dispose by controlled burning or seal cylinders and return to suppliers.
GRADES AVAILABLE
Silane is usually sold in very high purity grades
primarily for use in the electronics industry.
Check Digit Verification of cas no
The CAS Registry Mumber 7803-62-5 includes 7 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 4 digits, 7,8,0 and 3 respectively; the second part has 2 digits, 6 and 2 respectively.
Calculate Digit Verification of CAS Registry Number 7803-62:
(6*7)+(5*8)+(4*0)+(3*3)+(2*6)+(1*2)=105
105 % 10 = 5
So 7803-62-5 is a valid CAS Registry Number.
InChI:InChI=1/H4Si/h1H4