852572-07-7Relevant academic research and scientific papers
Photosensitive composition, compound for use in the photosensitive composition, and pattern forming method using the photosensitive composition
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, (2008/06/13)
A photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with actinic rays or a radiation; a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiat
