94442-22-5 Usage
Uses
Different sources of media describe the Uses of 94442-22-5 differently. You can refer to the following data:
1. Platinum complex widely used in CVD and ALD applications due, in part, to its simplicity (only C,H and Pt), volatility and moderate decomposition temperatures.
2. (Trimethyl)methylcyclopentadienylplatinum(IV) was used for the deposition of ultrathin metallic layers of platinum by electron beam induced deposition, atomic sputtering.These deposits find application in microelectronics, catalysis, photonics and chemical sensing.
3. Trimethyl(methylcyclopentadienyl)platinum(IV) is used as an organometallic precursor for platinum. It is used in the microelectronics, catalysis, photonics and chemical sensing processes. It is used for the deposition of ultrathin metallic layers of platinum by the electron beam induced deposition process.
4. Precursors Packaged for Depositions Systems
Chemical Properties
white to off-white crystals or crystalline powder
General Description
Trimethyl(methyl cyclopentadienyl)platinum(IV) ( MeCpPtMe3) is a commonly used organometallic precursor for platinum.
Check Digit Verification of cas no
The CAS Registry Mumber 94442-22-5 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 9,4,4,4 and 2 respectively; the second part has 2 digits, 2 and 2 respectively.
Calculate Digit Verification of CAS Registry Number 94442-22:
(7*9)+(6*4)+(5*4)+(4*4)+(3*2)+(2*2)+(1*2)=135
135 % 10 = 5
So 94442-22-5 is a valid CAS Registry Number.
InChI:InChI=1/C6H7.3CH3.Pt/c1-6-4-2-3-5-6;;;;/h2,4H,3H2,1H3;3*1H3;/rC9H16Pt/c1-8-6-5-7-9(8)10(2,3)4/h5-6H,7H2,1-4H3
