947731-49-9Relevant academic research and scientific papers
Volatile imido-hydrazido compounds of the refractory metals niobium, tantalum, molybdenum, and tungsten
Gaess, Daniel,Harms, Klaus,Pokoj, Michael,Stolz, Wolfgang,Sundermeyer, Joerg
, p. 6688 - 6701 (2008/10/09)
Volatile 1,1-dimethyl-2-(trimethylsilyl)hydrazido(1-) complexes of niobium, tantalum, molybdenum, and tungsten have been synthesized and fully characterized for use as precursors in their chemical vapor deposition to metal nitrides. Different reaction pat
