12627-41-7

Basic information

• Product Name: TUNGSTENSILICIDE
• CAS NO: 12627-41-7
• Molecular Formula: MW:
• Molecular Weight: 215.96
• Mol File: 12627-41-7.mol
• Article Data: 0

Chemical Properties

• Appearance: /
• CAS DataBase Reference: TUNGSTENSILICIDE(CAS DataBase Reference)
• NIST Chemistry Reference: TUNGSTENSILICIDE(12627-41-7)
• EPA Substance Registry System: TUNGSTENSILICIDE(12627-41-7)

Safety Data

• Hazardous Substances Data: 12627-41-7(Hazardous Substances Data)

Usage

Description

Tungsten silicide, with the chemical formula WSi2, is a refractory chemical compound composed of tungsten and silicon. It is known for its ability to withstand high temperatures without melting or deforming, making it a valuable material in various high-temperature applications. Its high electrical conductivity and compatibility with silicon contribute to its utility in microelectronics and semiconductor device manufacturing.

Uses

Used in Semiconductor Industry:
Tungsten silicide is used as a thin film material for integrated circuit fabrication due to its high-temperature stability and compatibility with silicon.
Used in Microelectronics:
Tungsten silicide is utilized as a diffusion barrier and contact material in semiconductor devices, taking advantage of its high electrical conductivity and compatibility with silicon.
Used in Thin-Film Resistors Production:
Tungsten silicide is employed in the production of thin-film resistors, capitalizing on its high temperature coefficient of resistance and stability at elevated temperatures.