885121-37-9Relevant articles and documents
Fluorinated monomer having cyclic structure, manufacturing method, polymer, photoresist composition and patterning process
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Page/Page column 43-44, (2008/06/13)
Cyclic structure-bearing fluorinated monomers having formula (1) wherein Z is a divalent organic group containing a polymerizable unsaturated group are useful to produce polymers for the manufacture of radiation-sensitive resist compositions which are ful