- Reduction Processes in the Fast Atom Bombardment Mass Spectrometry of Sulfonyl Esters of Diazonaphthalenones
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Orthoquinone diazides, which are widely used in microlithography, have attracted considerable attention, especially in terms of their application in the production of high-contrast resists.Previous electron impact mass spectrometric results have confirmed that the primary fragmentation process of these compounds is the elimination of N2 to form an indenoketene ion.This is analogous to the photodecomposition pathway which makes them effective in the lithographic process.Those results also revealed the occurrence of an alternative process, which involves a two-hydrogen reduction of the intermediate species formed prior to conversion to the ketene.The present study investigates the behaviour of the orthoquinone diazides when there is an abundance of protons available to form the reduction product.Several different types of diazonaphthalenone sulfonyl esters, ranging in complexity from the monosubstituted phenol esters to disubstituted dihydroxybenzophenones, were examined using fast atom bombardment mass spectrometry.Although reduction was the primary process in the hydrogen-rich matrices, the extent of reduction was characteristic of the particular isomer as well as the matrix used.
- Kyranos, James N.,du Sorbier, Bertrand M.,Wronka, John,Vouros, Paul,Kirby, Daniel P.
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- Single Pot Process For The Preparation Of Diazonaphthoquinonesulfonyl Ester
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The present invention provides a single pot process for the preparation of diazonaphthoquinonesulfonyl ester, a useful organic material for micro electronic and dye industry. This study pertains to the one pot preparation of diazonaphthoquinonesulfonyl esters using the corresponding diazonaphthoquinine sulfonic acid or its sodium salt, diphosgene or triphosgene, variety of hydroxy compounds and tertiary organic base in an organic solvent medium.
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Page/Page column 2; 4
(2008/06/13)
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- A SINGLE POT PROCESS FOR THE PREPARATION OF DIAZONAPHTHOQUINONESULFONYL ESTER
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The present invention provides a single pot process for the preparation of diazonaphthoquinonesulfonyl ester, a useful organic material for micro electronic and dye industry. This study pertains to the one pot preparation of diazonaphthoquinonesulfonyl esters using the corresponding diazonaphthoquinine sulfonic acid or its sodium salt, diphosgene or triphosgene, variety of hydroxy compounds and tertiary organic base in an organic solvent medium
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Page/Page column 5-6; 9-11
(2008/06/13)
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- Synthesis and Characterization of Substituted 2-Diazo-1-oxo-1,2-dihydronaphthalenes and Their Products of Photolysis and Thermolysis
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Several 2-diazo-1-oxo-1,2-dihydronaphthalenes (1, 2) have been synthesized by reaction of selected hydroxy compounds and 2-diazo-1-oxo-1,2-dihydronaphthalene-5- and -4-sulfonylchloride, respectively.Photolysis as well as thermolysis of 1 and 2 leads to final products, the nature of which depends on the position of substitution.So, reactions of 5-substituted derivatives (1) yield the corresponding indene-3-carboxylic acids 3 and their esters 5, respectively.In contrast, reactions of 4-substituted derivatives (2) lead to the formation of the 1-sulfo-indene-3-carboxylic acid derivatives 4 and 6.Prepared compounds have been characterized by means of mass, ultraviolet, infrared, 1H-n.m.r. and 13C-n.m.r. spectroscopy.
- Baumbach, B.,Bendig, J.,Nagel, T.,Dubsky, B.
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p. 625 - 635
(2007/10/02)
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