- Photosensitive compound
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Photosensitive compounds having preferably a functional group such as --SO2 Cl, --SO3 H, --SO3 R, STR1 (R, R', R" being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and STR2 moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
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