- ETCHANT COMPOSITION, METHOD OF ETCHING INSULATING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SILANE COMPOUND
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An etchant composition includes a silane compound represented by the following Chemical Formula 1: wherein R1 to R6 are independently hydrogen, halogen, a substituted or unsubstituted C1-C20 hydrocarbyl group, a phenyl group, a C1-C20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri (C1-C20) alkylsilyl group, a phosphoryl group, or a cyano group, L is a direct bond or C1-C3 hydrocarbylene, A is an n-valent radical, and n is an integer of 1 to 4.
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Paragraph 0080-0083
(2019/12/06)
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- Direct synthesis of 1-organylsilatranes from organyltrichlorosilanes and tris(2-hydroxyethyl)amine
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A direct method of synthesis of 1-organylsilatranes by the reaction of organyltrichlorosilanes with tris(2-hydroxyethyl)amine was developed. 1-Organylsilatranes RSi(OCH2CH2)3N with R = Me, Et, Ph, ClCH2, ICH2, Cl(CH2)3 were prepared by this method in up to 72% yield.
- Voronkov,Kuznetsova
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experimental part
p. 925 - 927
(2011/04/16)
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- A novel route to pentacoordinated organylsilanes and -germanes
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New convenient methods of sila- and germatranes synthesis from ethoxy- and tetraorganylsilanes and -germanes have been elaborated. The reaction of ethoxysilanes with boratrane in the presence of catalytic amounts of metal alcoholates has been investigated. Dimethylformamide (DMF) as a solvent and NaOEt as a catalyst used instead of xylene and Al(Oi-Pr)3 were found to give better yields. The possibility of using alkoxy-, aminosilanes, tetraethoxygermane and even tetraorganylsilanes in this reaction leading to the corresponding atranes with good yields has been demonstrated. Triethanolamine in the presence of catalytic amounts of base or CsF easily substitutes furyl-, dihydrofuryl-, dihydropyranyl- and thienyl groups in tris- and tetraheterylsilanes, leading to organylsilatranes with good to excellent yields.
- Gevorgyan, Vladimir,Borisova, Larisa,Vyater, Armand,Ryabova, Victoria,Lukevics, Edmunds
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p. 149 - 155
(2007/10/03)
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- MEDIUM-SIZED SILICON-CONTAINING RINGS. IV. SILOCANE-SILATRANE TRANSFORMATIONS
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We have discovered an intramolecular condensation of trimethylsilyl ethers of silocines with a phenyl substituent on the silicon atom that leads to the corresponding silatranes.For the preparation of N-(hydroxyethy) derivatives of silocines we have, for the first time, used the cyclosilylation of triethanolamine with a bis(dialkylamino)silane.It was found that in the exothermic reaction of trialkoxyalkylsilanes with N-(hydroxyethyl) derivatives of silocines and their trimethylsilyl ethers the yield of silatranes is only slighthly dependent on the nature of the substituent both in the silocines and in the alkoxysilanes.
- D'yakov, V. M.,Makarov, A. F.
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p. 291 - 294
(2007/10/02)
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- DIRECT TRANSFER OF ALIPHATIC AND AROMATIC SUBSTITUENTS FROM ORGANOSILATRANES TO MERCURY(II) SPECIES
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The relative reaction rates of several silatranes (derivatives of 2,8,9-trioxa-5-aza-1-silatricyclo1,5>undecane) and HgCl2 in acetone-d6 to yield the corresponding organomercury compound are of the order of e.g., 5 * 10-1 1 mol-1 sec-1 or slightly less, a rate that is unexpectedly high compared to the essentially inert parent organotrialkoxysilanes.Thus, the apical Si-C bond of the silatrane is extraordinarily susceptible to direct electrophilic attack by mercury(II).The rates decrease in the order CH2=CH, C6H5, p-ClC6H4 > CH3 > CH3CH2, CH3CH2CH2 > C6H11, ClCH2, Cl2CH, CH3CH2O.The effects of varying the solvent and the counterions are noted, and the probable mechanism is discussed.
- Nies, J. Dirk,Bellama, Jon M.,Ben-Zvi, Nava
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p. 315 - 320
(2007/10/02)
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- Atrane Analogous Compounds of the Type (I)
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Heterocyclic cage compounds of type I (compounds 8 - 10) have been prepared by condensation reactions of 1,2,2-trifunctional disilanes Me(R)XSiSiMeX2 (R = Me, Ph, OEt; X = NMe2, OEt) with triethanolamine using the "Dilution Principle".The starting compounds are obtained by Si - Me cleavage of Si2Me6 with acetylchloride/AlCl3 followed by either aminolysis with HNMe2 or alcoholysis with EtOH. 1H NMR spectra indicate N -> Si(1) intraction with the more acidic Si atom in 8 and 9.This result is proved by the X-ray structure analysis of 8 (monoclinic, P 21/c; a = 7.088(2), b = 15.070(4), c = 12.701(4) Angstroem, β = 104.96(2) at -130 deg C, Z = 4); the Si(1) *** N distance is found to be 2.768 Angstroem, connected with a significant angular distortion of the tetrahedral coordination around Si(1) towards a trigonal bipyramid.In compound 10, too, N -> Si(1) coordination is observed at room temperature in spite of almost equal acidity for both Si atoms.This can be explained by the preference of 5- over 6-membered chelating ring systems.At higher temperatures the 1H NMR spectra show a fluctuation of the N-donor between the two Si centres. - Key words: Silatranes, Transanular N -> Si-Interactions, NMR Spectra, X-Ray
- Grobe, Joseph,Henkel, Gerald,Krebs, Bernt,Voulgarakis, Nikolaos
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p. 341 - 351
(2007/10/02)
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